skip to main content
DOE Patents title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Solid source MOCVD system

Abstract

A system for MOCVD fabrication of superconducting and non-superconducting oxide films provides a delivery system for the feeding of metalorganic precursors for multi-component chemical vapor deposition. The delivery system can include multiple cartridges containing tightly packed precursor materials. The contents of each cartridge can be ground at a desired rate and fed together with precursor materials from other cartridges to a vaporization zone and then to a reaction zone within a deposition chamber for thin film deposition.

Inventors:
 [1];  [2]
  1. (Yakima, WA)
  2. (San Jose, CA)
Issue Date:
Research Org.:
Los Alamos National Laboratory (LANL), Los Alamos, NM
OSTI Identifier:
871889
Patent Number(s):
5820678
Assignee:
Regents of University of California (Los Alamos, NM) LANL
DOE Contract Number:  
W-7405-ENG-36
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
solid; source; mocvd; fabrication; superconducting; non-superconducting; oxide; films; provides; delivery; feeding; metalorganic; precursors; multi-component; chemical; vapor; deposition; multiple; cartridges; containing; tightly; packed; precursor; materials; contents; cartridge; ground; desired; rate; fed; vaporization; zone; reaction; chamber; film; conducting oxide; film deposition; oxide films; deposition chamber; chemical vapor; reaction zone; vapor deposition; oxide film; precursor material; precursor materials; superconducting oxide; solid source; organic precursors; organic precursor; vaporization zone; tightly packed; /118/

Citation Formats

Hubert, Brian N., and Wu, Xin Di. Solid source MOCVD system. United States: N. p., 1998. Web.
Hubert, Brian N., & Wu, Xin Di. Solid source MOCVD system. United States.
Hubert, Brian N., and Wu, Xin Di. Thu . "Solid source MOCVD system". United States. https://www.osti.gov/servlets/purl/871889.
@article{osti_871889,
title = {Solid source MOCVD system},
author = {Hubert, Brian N. and Wu, Xin Di},
abstractNote = {A system for MOCVD fabrication of superconducting and non-superconducting oxide films provides a delivery system for the feeding of metalorganic precursors for multi-component chemical vapor deposition. The delivery system can include multiple cartridges containing tightly packed precursor materials. The contents of each cartridge can be ground at a desired rate and fed together with precursor materials from other cartridges to a vaporization zone and then to a reaction zone within a deposition chamber for thin film deposition.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1998},
month = {1}
}

Patent:

Save / Share: