Solid source MOCVD system
Abstract
A system for MOCVD fabrication of superconducting and non-superconducting oxide films provides a delivery system for the feeding of metalorganic precursors for multi-component chemical vapor deposition. The delivery system can include multiple cartridges containing tightly packed precursor materials. The contents of each cartridge can be ground at a desired rate and fed together with precursor materials from other cartridges to a vaporization zone and then to a reaction zone within a deposition chamber for thin film deposition.
- Inventors:
-
- Yakima, WA
- San Jose, CA
- Issue Date:
- Research Org.:
- Los Alamos National Laboratory (LANL), Los Alamos, NM (United States)
- OSTI Identifier:
- 871889
- Patent Number(s):
- 5820678
- Assignee:
- Regents of University of California (Los Alamos, NM)
- Patent Classifications (CPCs):
-
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
- DOE Contract Number:
- W-7405-ENG-36
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- solid; source; mocvd; fabrication; superconducting; non-superconducting; oxide; films; provides; delivery; feeding; metalorganic; precursors; multi-component; chemical; vapor; deposition; multiple; cartridges; containing; tightly; packed; precursor; materials; contents; cartridge; ground; desired; rate; fed; vaporization; zone; reaction; chamber; film; conducting oxide; film deposition; oxide films; deposition chamber; chemical vapor; reaction zone; vapor deposition; oxide film; precursor material; precursor materials; superconducting oxide; solid source; organic precursors; organic precursor; vaporization zone; tightly packed; /118/
Citation Formats
Hubert, Brian N, and Wu, Xin Di. Solid source MOCVD system. United States: N. p., 1998.
Web.
Hubert, Brian N, & Wu, Xin Di. Solid source MOCVD system. United States.
Hubert, Brian N, and Wu, Xin Di. Thu .
"Solid source MOCVD system". United States. https://www.osti.gov/servlets/purl/871889.
@article{osti_871889,
title = {Solid source MOCVD system},
author = {Hubert, Brian N and Wu, Xin Di},
abstractNote = {A system for MOCVD fabrication of superconducting and non-superconducting oxide films provides a delivery system for the feeding of metalorganic precursors for multi-component chemical vapor deposition. The delivery system can include multiple cartridges containing tightly packed precursor materials. The contents of each cartridge can be ground at a desired rate and fed together with precursor materials from other cartridges to a vaporization zone and then to a reaction zone within a deposition chamber for thin film deposition.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1998},
month = {1}
}
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