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Title: Acoustic-wave sensor for ambient monitoring of a photoresist-stripping agent

Abstract

The acoustic-wave sensor. The acoustic-wave sensor is designed for ambient or vapor-phase monitoring of a photoresist-stripping agent such as N-methylpyrrolidinone (NMP), ethoxyethylpropionate (EEP) or the like. The acoustic-wave sensor comprises an acoustic-wave device such as a surface-acoustic-wave (SAW) device, a flexural-plate-wave (FPW) device, an acoustic-plate-mode (APM) device, or a thickness-shear-mode (TSM) device (also termed a quartz crystal microbalance or QCM) having a sensing region on a surface thereof. The sensing region includes a sensing film for sorbing a quantity of the photoresist-stripping agent, thereby altering or shifting a frequency of oscillation of an acoustic wave propagating through the sensing region for indicating an ambient concentration of the agent. According to preferred embodiments of the invention, the acoustic-wave device is a SAW device; and the sensing film comprises poly(vinylacetate), poly(N-vinylpyrrolidinone), or poly(vinylphenol).

Inventors:
 [1];  [2];  [3]
  1. (Los Lunas, NM)
  2. (Albuquerque, NM)
  3. (Cedar Crest, NM)
Issue Date:
Research Org.:
SANDIA CORP
OSTI Identifier:
871788
Patent Number(s):
5795993
Assignee:
Sandia Corporation (Albuquerque, NM) SNL
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
acoustic-wave; sensor; ambient; monitoring; photoresist-stripping; agent; designed; vapor-phase; n-methylpyrrolidinone; nmp; ethoxyethylpropionate; comprises; device; surface-acoustic-wave; flexural-plate-wave; fpw; acoustic-plate-mode; apm; thickness-shear-mode; tsm; termed; quartz; crystal; microbalance; qcm; sensing; region; surface; film; sorbing; quantity; altering; shifting; frequency; oscillation; acoustic; wave; propagating; indicating; concentration; according; preferred; embodiments; poly; vinylacetate; n-vinylpyrrolidinone; vinylphenol; acoustic-wave device; preferred embodiments; acoustic wave; preferred embodiment; quartz crystal; sensor comprises; acoustic-wave sensor; film comprises; wave device; sensing film; photoresist-stripping agent; crystal microbalance; phase monitor; comprises poly; wave sensor; /73/

Citation Formats

Pfeifer, Kent B., Hoyt, Andrea E., and Frye, Gregory C. Acoustic-wave sensor for ambient monitoring of a photoresist-stripping agent. United States: N. p., 1998. Web.
Pfeifer, Kent B., Hoyt, Andrea E., & Frye, Gregory C. Acoustic-wave sensor for ambient monitoring of a photoresist-stripping agent. United States.
Pfeifer, Kent B., Hoyt, Andrea E., and Frye, Gregory C. Thu . "Acoustic-wave sensor for ambient monitoring of a photoresist-stripping agent". United States. https://www.osti.gov/servlets/purl/871788.
@article{osti_871788,
title = {Acoustic-wave sensor for ambient monitoring of a photoresist-stripping agent},
author = {Pfeifer, Kent B. and Hoyt, Andrea E. and Frye, Gregory C.},
abstractNote = {The acoustic-wave sensor. The acoustic-wave sensor is designed for ambient or vapor-phase monitoring of a photoresist-stripping agent such as N-methylpyrrolidinone (NMP), ethoxyethylpropionate (EEP) or the like. The acoustic-wave sensor comprises an acoustic-wave device such as a surface-acoustic-wave (SAW) device, a flexural-plate-wave (FPW) device, an acoustic-plate-mode (APM) device, or a thickness-shear-mode (TSM) device (also termed a quartz crystal microbalance or QCM) having a sensing region on a surface thereof. The sensing region includes a sensing film for sorbing a quantity of the photoresist-stripping agent, thereby altering or shifting a frequency of oscillation of an acoustic wave propagating through the sensing region for indicating an ambient concentration of the agent. According to preferred embodiments of the invention, the acoustic-wave device is a SAW device; and the sensing film comprises poly(vinylacetate), poly(N-vinylpyrrolidinone), or poly(vinylphenol).},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1998},
month = {1}
}

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