Rinse trough with improved flow
Abstract
Novel rinse troughs accomplish thorough uniform rinsing. The troughs are suitable for one or more essentially planar objects having substantially the same shape. The troughs ensure that each surface is rinsed uniformly. The new troughs provide uniform rinse fluid flow over the objects' surfaces to accomplish a more thorough rinse than prior art troughs.
- Inventors:
-
- Albuquerque, NM
- Issue Date:
- Research Org.:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- OSTI Identifier:
- 871764
- Patent Number(s):
- 5791358
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Classifications (CPCs):
-
B - PERFORMING OPERATIONS B08 - CLEANING B08B - CLEANING IN GENERAL
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- rinse; trough; improved; flow; novel; troughs; accomplish; thorough; uniform; rinsing; suitable; essentially; planar; substantially; shape; ensure; surface; rinsed; uniformly; provide; fluid; surfaces; prior; fluid flow; provide uniform; essentially planar; improved flow; rinsed uniformly; rinse trough; rinse troughs; novel rinse; uniform rinsing; troughs ensure; troughs accomplish; thorough uniform; accomplish thorough; /134/
Citation Formats
O'Hern, Timothy J, and Grasser, Thomas W. Rinse trough with improved flow. United States: N. p., 1998.
Web.
O'Hern, Timothy J, & Grasser, Thomas W. Rinse trough with improved flow. United States.
O'Hern, Timothy J, and Grasser, Thomas W. Thu .
"Rinse trough with improved flow". United States. https://www.osti.gov/servlets/purl/871764.
@article{osti_871764,
title = {Rinse trough with improved flow},
author = {O'Hern, Timothy J and Grasser, Thomas W},
abstractNote = {Novel rinse troughs accomplish thorough uniform rinsing. The troughs are suitable for one or more essentially planar objects having substantially the same shape. The troughs ensure that each surface is rinsed uniformly. The new troughs provide uniform rinse fluid flow over the objects' surfaces to accomplish a more thorough rinse than prior art troughs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Thu Jan 01 00:00:00 EST 1998},
month = {Thu Jan 01 00:00:00 EST 1998}
}
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