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Title: Capacitive charge generation apparatus and method for testing circuits

Abstract

An electron beam apparatus and method for testing a circuit. The electron beam apparatus comprises an electron beam incident on an outer surface of an insulating layer overlying one or more electrical conductors of the circuit for generating a time varying or alternating current electrical potential on the surface; and a measurement unit connected to the circuit for measuring an electrical signal capacitively coupled to the electrical conductors to identify and map a conduction state of each of the electrical conductors, with or without an electrical bias signal being applied to the circuit. The electron beam apparatus can further include a secondary electron detector for forming a secondary electron image for registration with a map of the conduction state of the electrical conductors. The apparatus and method are useful for failure analysis or qualification testing to determine the presence of any open-circuits or short-circuits, and to verify the continuity or integrity of electrical conductors buried below an insulating layer thickness of 1-100 .mu.m or more without damaging or breaking down the insulating layer. The types of electrical circuits that can be tested include integrated circuits, multi-chip modules, printed circuit boards and flexible printed circuits.

Inventors:
 [1];  [1];  [1]
  1. (Albuquerque, NM)
Issue Date:
Research Org.:
SANDIA CORP
OSTI Identifier:
871713
Patent Number(s):
5781017
Assignee:
Sandia Corporation (Albuquerque, NM) SNL
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
capacitive; charge; generation; apparatus; method; testing; circuits; electron; beam; circuit; comprises; incident; outer; surface; insulating; layer; overlying; electrical; conductors; generating; time; varying; alternating; current; potential; measurement; unit; connected; measuring; signal; capacitively; coupled; identify; map; conduction; bias; applied; secondary; detector; forming; image; registration; useful; failure; analysis; qualification; determine; presence; open-circuits; short-circuits; verify; continuity; integrity; buried; below; thickness; 1-100; damaging; breaking; types; tested; integrated; multi-chip; modules; printed; boards; flexible; beam apparatus; time varying; electrical circuits; multi-chip modules; capacitively coupled; electrical bias; electrical conductors; circuit board; electrical potential; apparatus comprises; electrical signal; electron beam; outer surface; alternating current; integrated circuits; integrated circuit; electrical circuit; printed circuit; insulating layer; electrical conductor; failure analysis; secondary electron; circuit boards; layer thickness; unit connected; beam incident; apparatus comprise; multi-chip module; charge generation; electron detector; layer overlying; current electric; current electrical; /324/

Citation Formats

Cole, Jr., Edward I., Peterson, Kenneth A., and Barton, Daniel L. Capacitive charge generation apparatus and method for testing circuits. United States: N. p., 1998. Web.
Cole, Jr., Edward I., Peterson, Kenneth A., & Barton, Daniel L. Capacitive charge generation apparatus and method for testing circuits. United States.
Cole, Jr., Edward I., Peterson, Kenneth A., and Barton, Daniel L. Thu . "Capacitive charge generation apparatus and method for testing circuits". United States. https://www.osti.gov/servlets/purl/871713.
@article{osti_871713,
title = {Capacitive charge generation apparatus and method for testing circuits},
author = {Cole, Jr., Edward I. and Peterson, Kenneth A. and Barton, Daniel L.},
abstractNote = {An electron beam apparatus and method for testing a circuit. The electron beam apparatus comprises an electron beam incident on an outer surface of an insulating layer overlying one or more electrical conductors of the circuit for generating a time varying or alternating current electrical potential on the surface; and a measurement unit connected to the circuit for measuring an electrical signal capacitively coupled to the electrical conductors to identify and map a conduction state of each of the electrical conductors, with or without an electrical bias signal being applied to the circuit. The electron beam apparatus can further include a secondary electron detector for forming a secondary electron image for registration with a map of the conduction state of the electrical conductors. The apparatus and method are useful for failure analysis or qualification testing to determine the presence of any open-circuits or short-circuits, and to verify the continuity or integrity of electrical conductors buried below an insulating layer thickness of 1-100 .mu.m or more without damaging or breaking down the insulating layer. The types of electrical circuits that can be tested include integrated circuits, multi-chip modules, printed circuit boards and flexible printed circuits.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1998},
month = {1}
}

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