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Title: Method for preventing micromechanical structures from adhering to another object

Abstract

A method for preventing micromechanical structures from adhering to another object includes the step of immersing a micromechanical structure and its associated substrate in a chemical species that does not stick to itself. The method can be employed during the manufacture of micromechanical structures to prevent micromechanical parts from sticking or adhering to one another and their associated substrate surface.

Inventors:
 [1];  [1]
  1. Albuquerque, NM
Issue Date:
Research Org.:
AT&T Corp., Albuquerque, NM (United States)
OSTI Identifier:
871621
Patent Number(s):
5766367
Assignee:
Sandia Corporation (Albuquerque, NM)
Patent Classifications (CPCs):
B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81C - PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
DOE Contract Number:  
AC04-76DP00789
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
method; preventing; micromechanical; structures; adhering; step; immersing; structure; associated; substrate; chemical; species; stick; employed; manufacture; prevent; sticking; surface; micromechanical structure; chemical species; substrate surface; chemical specie; micromechanical structures; associated substrate; mechanical structure; preventing micromechanical; /134/216/

Citation Formats

Smith, James H, and Ricco, Antonio J. Method for preventing micromechanical structures from adhering to another object. United States: N. p., 1998. Web.
Smith, James H, & Ricco, Antonio J. Method for preventing micromechanical structures from adhering to another object. United States.
Smith, James H, and Ricco, Antonio J. Thu . "Method for preventing micromechanical structures from adhering to another object". United States. https://www.osti.gov/servlets/purl/871621.
@article{osti_871621,
title = {Method for preventing micromechanical structures from adhering to another object},
author = {Smith, James H and Ricco, Antonio J},
abstractNote = {A method for preventing micromechanical structures from adhering to another object includes the step of immersing a micromechanical structure and its associated substrate in a chemical species that does not stick to itself. The method can be employed during the manufacture of micromechanical structures to prevent micromechanical parts from sticking or adhering to one another and their associated substrate surface.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1998},
month = {1}
}

Patent:

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