Method for preventing micromechanical structures from adhering to another object
Abstract
A method for preventing micromechanical structures from adhering to another object includes the step of immersing a micromechanical structure and its associated substrate in a chemical species that does not stick to itself. The method can be employed during the manufacture of micromechanical structures to prevent micromechanical parts from sticking or adhering to one another and their associated substrate surface.
- Inventors:
-
- (Albuquerque, NM)
- Issue Date:
- Research Org.:
- AT & T CORP
- OSTI Identifier:
- 871621
- Patent Number(s):
- 5766367
- Assignee:
- Sandia Corporation (Albuquerque, NM) SNL
- DOE Contract Number:
- AC04-76DP00789
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- method; preventing; micromechanical; structures; adhering; step; immersing; structure; associated; substrate; chemical; species; stick; employed; manufacture; prevent; sticking; surface; micromechanical structure; chemical species; substrate surface; chemical specie; micromechanical structures; associated substrate; mechanical structure; preventing micromechanical; /134/216/
Citation Formats
Smith, James H., and Ricco, Antonio J. Method for preventing micromechanical structures from adhering to another object. United States: N. p., 1998.
Web.
Smith, James H., & Ricco, Antonio J. Method for preventing micromechanical structures from adhering to another object. United States.
Smith, James H., and Ricco, Antonio J. Thu .
"Method for preventing micromechanical structures from adhering to another object". United States. https://www.osti.gov/servlets/purl/871621.
@article{osti_871621,
title = {Method for preventing micromechanical structures from adhering to another object},
author = {Smith, James H. and Ricco, Antonio J.},
abstractNote = {A method for preventing micromechanical structures from adhering to another object includes the step of immersing a micromechanical structure and its associated substrate in a chemical species that does not stick to itself. The method can be employed during the manufacture of micromechanical structures to prevent micromechanical parts from sticking or adhering to one another and their associated substrate surface.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1998},
month = {1}
}
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