Method for preventing micromechanical structures from adhering to another object

Smith, James H; Ricco, Antonio J

Title: Method for preventing micromechanical structures from adhering to another object

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Abstract

A method for preventing micromechanical structures from adhering to another object includes the step of immersing a micromechanical structure and its associated substrate in a chemical species that does not stick to itself. The method can be employed during the manufacture of micromechanical structures to prevent micromechanical parts from sticking or adhering to one another and their associated substrate surface.

Inventors:

Smith, James H ^[1]; Ricco, Antonio J ^[1]

Albuquerque, NM

Issue Date:: 1998-01-01

Research Org.:: AT&T

OSTI Identifier:: 871621

Patent Number(s):: 5766367

Assignee:: Sandia Corporation (Albuquerque, NM)

Patent Classifications (CPCs):: B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81C - PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS

C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL

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B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81C - PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
B81C1/00928 - {Eliminating or avoiding remaining moisture after the wet etch release of the movable structure}

C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
C23C22/68 - using aqueous solutions with pH between 6 and 8

B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81C - PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
B81C2201/117 - Using supercritical fluid, e.g. carbon dioxide, for removing sacrificial layers

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DOE Contract Number:: AC04-76DP00789

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Subject:: method; preventing; micromechanical; structures; adhering; step; immersing; structure; associated; substrate; chemical; species; stick; employed; manufacture; prevent; sticking; surface; micromechanical structure; chemical species; substrate surface; chemical specie; micromechanical structures; associated substrate; mechanical structure; preventing micromechanical; /134/216/

Citation Formats


                    Smith, James H, and Ricco, Antonio J. Method for preventing micromechanical structures from adhering to another object.  United States: N. p., 1998. 
        Web.

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                    Smith, James H, & Ricco, Antonio J. Method for preventing micromechanical structures from adhering to another object.  United States.

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                    Smith, James H, and Ricco, Antonio J. Thu .  
        "Method for preventing micromechanical structures from adhering to another object".  United States.  https://www.osti.gov/servlets/purl/871621.

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@article{osti_871621,

  title        = {Method for preventing micromechanical structures from adhering to another object},

  author       = {Smith, James H and Ricco, Antonio J},

  abstractNote = {A method for preventing micromechanical structures from adhering to another object includes the step of immersing a micromechanical structure and its associated substrate in a chemical species that does not stick to itself. The method can be employed during the manufacture of micromechanical structures to prevent micromechanical parts from sticking or adhering to one another and their associated substrate surface.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {1998},

  month        = {1}

}

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