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Title: Amorphous diamond films

Abstract

Amorphous diamond films having a significant reduction in intrinsic stress are prepared by biasing a substrate to be coated and depositing carbon ions thereon under controlled temperature conditions.

Inventors:
 [1]
  1. (Livermore, CA)
Issue Date:
Research Org.:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
OSTI Identifier:
871607
Patent Number(s):
5763087
Assignee:
Regents of University of California (Oakland, CA) LLNL
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
amorphous; diamond; films; significant; reduction; intrinsic; stress; prepared; biasing; substrate; coated; depositing; carbon; thereon; controlled; temperature; conditions; amorphous diamond; temperature conditions; controlled temperature; significant reduction; diamond film; diamond films; depositing carbon; intrinsic stress; /428/51/423/

Citation Formats

Falabella, Steven. Amorphous diamond films. United States: N. p., 1998. Web.
Falabella, Steven. Amorphous diamond films. United States.
Falabella, Steven. Thu . "Amorphous diamond films". United States. https://www.osti.gov/servlets/purl/871607.
@article{osti_871607,
title = {Amorphous diamond films},
author = {Falabella, Steven},
abstractNote = {Amorphous diamond films having a significant reduction in intrinsic stress are prepared by biasing a substrate to be coated and depositing carbon ions thereon under controlled temperature conditions.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1998},
month = {1}
}

Patent:

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