Amorphous diamond films
Abstract
Amorphous diamond films having a significant reduction in intrinsic stress are prepared by biasing a substrate to be coated and depositing carbon ions thereon under controlled temperature conditions.
- Inventors:
-
- (Livermore, CA)
- Issue Date:
- Research Org.:
- Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
- OSTI Identifier:
- 871607
- Patent Number(s):
- 5763087
- Assignee:
- Regents of University of California (Oakland, CA) LLNL
- DOE Contract Number:
- W-7405-ENG-48
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- amorphous; diamond; films; significant; reduction; intrinsic; stress; prepared; biasing; substrate; coated; depositing; carbon; thereon; controlled; temperature; conditions; amorphous diamond; temperature conditions; controlled temperature; significant reduction; diamond film; diamond films; depositing carbon; intrinsic stress; /428/51/423/
Citation Formats
Falabella, Steven. Amorphous diamond films. United States: N. p., 1998.
Web.
Falabella, Steven. Amorphous diamond films. United States.
Falabella, Steven. Thu .
"Amorphous diamond films". United States. https://www.osti.gov/servlets/purl/871607.
@article{osti_871607,
title = {Amorphous diamond films},
author = {Falabella, Steven},
abstractNote = {Amorphous diamond films having a significant reduction in intrinsic stress are prepared by biasing a substrate to be coated and depositing carbon ions thereon under controlled temperature conditions.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1998},
month = {1}
}
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