Electrically-programmable diffraction grating
Abstract
An electrically-programmable diffraction grating. The programmable grating includes a substrate having a plurality of electrodes formed thereon and a moveable grating element above each of the electrodes. The grating elements are electrostatically programmable to form a diffraction grating for diffracting an incident beam of light as it is reflected from the upper surfaces of the grating elements. The programmable diffraction grating, formed by a micromachining process, has applications for optical information processing (e.g. optical correlators and computers), for multiplexing and demultiplexing a plurality of light beams of different wavelengths (e.g. for optical fiber communications), and for forming spectrometers (e.g. correlation and scanning spectrometers).
- Inventors:
-
- Albuquerque, NM
- Brookline, MA
- Issue Date:
- Research Org.:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- OSTI Identifier:
- 871582
- Patent Number(s):
- 5757536
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Classifications (CPCs):
-
G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- electrically-programmable; diffraction; grating; programmable; substrate; plurality; electrodes; formed; thereon; moveable; element; elements; electrostatically; form; diffracting; incident; beam; light; reflected; upper; surfaces; micromachining; process; applications; optical; information; processing; correlators; computers; multiplexing; demultiplexing; beams; wavelengths; fiber; communications; forming; spectrometers; correlation; scanning; electrodes formed; upper surface; diffraction grating; optical fiber; light beam; light beams; incident beam; formed thereon; optical information; machining process; micromachining process; electrically-programmable diffraction; information processing; grating element; formation process; /359/
Citation Formats
Ricco, Antonio J, Butler, Michael A, Sinclair, Michael B, and Senturia, Stephen D. Electrically-programmable diffraction grating. United States: N. p., 1998.
Web.
Ricco, Antonio J, Butler, Michael A, Sinclair, Michael B, & Senturia, Stephen D. Electrically-programmable diffraction grating. United States.
Ricco, Antonio J, Butler, Michael A, Sinclair, Michael B, and Senturia, Stephen D. Tue .
"Electrically-programmable diffraction grating". United States. https://www.osti.gov/servlets/purl/871582.
@article{osti_871582,
title = {Electrically-programmable diffraction grating},
author = {Ricco, Antonio J and Butler, Michael A and Sinclair, Michael B and Senturia, Stephen D},
abstractNote = {An electrically-programmable diffraction grating. The programmable grating includes a substrate having a plurality of electrodes formed thereon and a moveable grating element above each of the electrodes. The grating elements are electrostatically programmable to form a diffraction grating for diffracting an incident beam of light as it is reflected from the upper surfaces of the grating elements. The programmable diffraction grating, formed by a micromachining process, has applications for optical information processing (e.g. optical correlators and computers), for multiplexing and demultiplexing a plurality of light beams of different wavelengths (e.g. for optical fiber communications), and for forming spectrometers (e.g. correlation and scanning spectrometers).},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1998},
month = {5}
}
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Works referenced in this record:
Electrostatic Comb Drive Levitation And Control Method
journal, December 1992
- Tang, W. C.; Lim, M. G.; Howe, R. T.
- Journal of Microelectromechanical Systems, Vol. 1, Issue 4
A miniature Fabry-Perot interferometer with a corrugated silicon diaphragm support
journal, November 1991
- Jerman, J. H.; Clift, D. J.; Mallinson, S. R.
- Sensors and Actuators A: Physical, Vol. 29, Issue 2
Performance of nonplanar silicon diaphragms under large deflections
journal, June 1994
- Zhang, Yafan; Wise, K. D.
- Journal of Microelectromechanical Systems, Vol. 3, Issue 2, p. 59-68
Design, fabrication, and testing of silicon microgimbals for super-compact rigid disk drives
journal, March 1995
- Temesvary, V.; Wu, Shuyun; Hsieh, W. H.
- Journal of Microelectromechanical Systems, Vol. 4, Issue 1, p. 18-27
Deformable grating optical modulator
journal, January 1992
- Solgaard, O.; Sandejas, F. S. A.; Bloom, D. M.
- Optics Letters, Vol. 17, Issue 9
Miniature Fabry-Perot interferometers micromachined in silicon for use in optical fiber WDM systems
conference, January 1991
- Jerman, J. H.; Clift, D. J.
- TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers
Micromechanical light modulator array fabricated on silicon
journal, October 1977
- Petersen, K. E.
- Applied Physics Letters, Vol. 31, Issue 8
Deformable-Mirror Spatial Light Modulators
conference, May 1990
- Hornbeck, Larry J.
- 33rd Annual Techincal Symposium, SPIE Proceedings
A 128 X 128 frame-addressed deformable mirror spatial light modulator
journal, January 1991
- Boysel, R. Mark
- Optical Engineering, Vol. 30, Issue 9
A bulk silicon dissolved wafer process for microelectromechanical devices
journal, June 1992
- Gianchandani, Y. B.; Najafi, K.
- Journal of Microelectromechanical Systems, Vol. 1, Issue 2
Design of sealed cavity microstructures formed by silicon wafer bonding
journal, June 1993
- Huff, M. A.; Nikolich, A. D.; Schmidt, M. A.
- Journal of Microelectromechanical Systems, Vol. 2, Issue 2