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Title: Forming aspheric optics by controlled deposition

Abstract

An aspheric optical element formed by depositing material onto a spherical surface of an optical element by controlled deposition to form an aspheric surface of desired shape. A reflecting surface, single or multi-layer, can then be formed on the aspheric surface by evaporative or sputtering techniques. Aspheric optical elements are suitable for deep ultra-violet (UV) and x-ray wavelengths. The reflecting surface may, for example, be a thin (.about.100 nm) layer of aluminum, or in some cases the deposited modifying layer may function as the reflecting surface. For certain applications, multi-layer reflective surfaces may be utilized, such as chromium-carbon or tungsten-carbon multi-layer, with the number of layers and thickness being determined by the intended application.

Inventors:
 [1]
  1. (Modesto, CA)
Issue Date:
Research Org.:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
OSTI Identifier:
871511
Patent Number(s):
5745286
Assignee:
Regents of University of California (Oakland, CA) LLNL
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
forming; aspheric; optics; controlled; deposition; optical; element; formed; depositing; material; spherical; surface; form; desired; shape; reflecting; single; multi-layer; evaporative; sputtering; techniques; elements; suitable; deep; ultra-violet; x-ray; wavelengths; example; 100; nm; layer; aluminum; deposited; modifying; function; applications; reflective; surfaces; utilized; chromium-carbon; tungsten-carbon; layers; thickness; determined; intended; application; depositing material; optical element; optical elements; reflecting surface; desired shape; reflective surface; reflective surfaces; spherical surface; x-ray wavelengths; aspheric surface; aspheric optics; intended application; controlled deposition; ray wavelength; element formed; deep ultra-violet; /359/

Citation Formats

Hawryluk, Andrew M. Forming aspheric optics by controlled deposition. United States: N. p., 1998. Web.
Hawryluk, Andrew M. Forming aspheric optics by controlled deposition. United States.
Hawryluk, Andrew M. Thu . "Forming aspheric optics by controlled deposition". United States. https://www.osti.gov/servlets/purl/871511.
@article{osti_871511,
title = {Forming aspheric optics by controlled deposition},
author = {Hawryluk, Andrew M.},
abstractNote = {An aspheric optical element formed by depositing material onto a spherical surface of an optical element by controlled deposition to form an aspheric surface of desired shape. A reflecting surface, single or multi-layer, can then be formed on the aspheric surface by evaporative or sputtering techniques. Aspheric optical elements are suitable for deep ultra-violet (UV) and x-ray wavelengths. The reflecting surface may, for example, be a thin (.about.100 nm) layer of aluminum, or in some cases the deposited modifying layer may function as the reflecting surface. For certain applications, multi-layer reflective surfaces may be utilized, such as chromium-carbon or tungsten-carbon multi-layer, with the number of layers and thickness being determined by the intended application.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1998},
month = {1}
}

Patent:

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