Nanostructure multilayer dielectric materials for capacitors and insulators

Title: Nanostructure multilayer dielectric materials for capacitors and insulators

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A capacitor is formed of at least two metal conductors having a multilayer dielectric and opposite dielectric-conductor interface layers in between. The multilayer dielectric includes many alternating layers of amorphous zirconium oxide (ZrO.sub.2) and alumina (Al.sub.2 O.sub.3). The dielectric-conductor interface layers are engineered for increased voltage breakdown and extended service life. The local interfacial work function is increased to reduce charge injection and thus increase breakdown voltage. Proper material choices can prevent electrochemical reactions and diffusion between the conductor and dielectric. Physical vapor deposition is used to deposit the zirconium oxide (ZrO.sub.2) and alumina (Al.sub.2 O.sub.3) in alternating layers to form a nano-laminate.

Inventors:

Barbee, Jr., Troy W. ^[1]; Johnson, Gary W. ^[2]

(Palo Alto, CA)
(Livermore, CA)

Issue Date:: 1998-04-21

OSTI Identifier:: 871490

Assignee:: Regents of University of California (Oakland, CA) LLNL

Patent Number(s):: US 5742471

Application Number:: 08/755619

Contract Number:: W-7405-ENG-48

Research Org:: Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)

Country of Publication:: United States

Language:: English

Subject:: nanostructure; multilayer; dielectric; materials; capacitors; insulators; capacitor; formed; metal; conductors; opposite; dielectric-conductor; interface; layers; alternating; amorphous; zirconium; oxide; zro; alumina; engineered; increased; voltage; breakdown; extended; service; life; local; interfacial; function; reduce; charge; injection; increase; proper; material; choices; prevent; electrochemical; reactions; diffusion; conductor; physical; vapor; deposition; deposit; form; nano-laminate; service life; multilayer dielectric; dielectric materials; breakdown voltage; metal conductor; alternating layers; vapor deposition; chemical reaction; physical vapor; zirconium oxide; dielectric material; chemical reactions; electrochemical reaction; voltage breakdown; metal conductors; electrochemical reactions; interface layer; interface layers; metal conduct; /361/29/

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