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Title: Optical filter including a sub-wavelength periodic structure and method of making

Abstract

An optical filter includes a dielectric layer formed within a resonant optical cavity, with the dielectric layer having formed therein a sub-wavelength periodic structure to define, at least in part, a wavelength for transmission of light through the resonant optical cavity. The sub-wavelength periodic structure can be formed either by removing material from the dielectric layer (e.g. by etching through an electron-beam defined mask), or by altering the composition of the layer (e.g. by ion implantation). Different portions of the dielectric layer can be patterned to form one or more optical interference filter elements having different light transmission wavelengths so that the optical filter can filter incident light according to wavelength and/or polarization. For some embodiments, the optical filter can include a detector element in optical alignment with each optical interference filter element to quantify or measure the filtered light for analysis thereof. The optical filter has applications to spectrometry, colorimetry, and chemical sensing.

Inventors:
 [1];  [1]
  1. Albuquerque, NM
Issue Date:
Research Org.:
Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
OSTI Identifier:
871416
Patent Number(s):
5726805
Assignee:
Sandia Corporation (Albuquerque, NM)
Patent Classifications (CPCs):
G - PHYSICS G01 - MEASURING G01J - MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT
G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
optical; filter; including; sub-wavelength; periodic; structure; method; dielectric; layer; formed; resonant; cavity; therein; define; wavelength; transmission; light; removing; material; etching; electron-beam; defined; mask; altering; composition; implantation; portions; patterned; form; interference; elements; wavelengths; incident; according; polarization; embodiments; detector; element; alignment; quantify; measure; filtered; analysis; applications; spectrometry; colorimetry; chemical; sensing; chemical sensing; light transmission; optical alignment; resonant optical; removing material; incident light; filter elements; layer formed; interference filter; optical filter; formed therein; dielectric layer; filter element; optical cavity; detector element; sub-wavelength periodic; optical interference; periodic structure; filter including; filtered light; /359/

Citation Formats

Kaushik, Sumanth, and Stallard, Brian R. Optical filter including a sub-wavelength periodic structure and method of making. United States: N. p., 1998. Web.
Kaushik, Sumanth, & Stallard, Brian R. Optical filter including a sub-wavelength periodic structure and method of making. United States.
Kaushik, Sumanth, and Stallard, Brian R. Tue . "Optical filter including a sub-wavelength periodic structure and method of making". United States. https://www.osti.gov/servlets/purl/871416.
@article{osti_871416,
title = {Optical filter including a sub-wavelength periodic structure and method of making},
author = {Kaushik, Sumanth and Stallard, Brian R},
abstractNote = {An optical filter includes a dielectric layer formed within a resonant optical cavity, with the dielectric layer having formed therein a sub-wavelength periodic structure to define, at least in part, a wavelength for transmission of light through the resonant optical cavity. The sub-wavelength periodic structure can be formed either by removing material from the dielectric layer (e.g. by etching through an electron-beam defined mask), or by altering the composition of the layer (e.g. by ion implantation). Different portions of the dielectric layer can be patterned to form one or more optical interference filter elements having different light transmission wavelengths so that the optical filter can filter incident light according to wavelength and/or polarization. For some embodiments, the optical filter can include a detector element in optical alignment with each optical interference filter element to quantify or measure the filtered light for analysis thereof. The optical filter has applications to spectrometry, colorimetry, and chemical sensing.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1998},
month = {3}
}

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Works referenced in this record:

Submicrometer periodicity gratings as artificial anisotropic dielectrics
journal, March 1983


Antireflection effect in ultrahigh spatial-frequency holographic relief gratings
journal, January 1987


Antireflection gold surface-relief gratings: experimental characteristics
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Optical elements with ultrahigh spatial-frequency surface corrugations
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Two-dimensional array of optical interference filters produced by lithographic alterations of the index of refraction
conference, September 1995

  • Kaushik, Sumanth; Stallard, Brian R.
  • SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation, SPIE Proceedings
  • https://doi.org/10.1117/12.221254

New principle for optical filters
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Near-IR Reflectance Spectroscopy for the Determination of Motor Oil Contamination in Sandy Loam
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