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Title: Microcantilever sensor

Abstract

An improved microcantilever sensor is fabricated with at least one microcantilever attached to a piezoelectric transducer. The microcantilever is partially surface treated with a compound selective substance having substantially exclusive affinity for a targeted compound in a monitored atmosphere. The microcantilever sensor is also provided with a frequency detection means and a bending detection means. The frequency detection means is capable of detecting changes in the resonance frequency of the vibrated microcantilever in the monitored atmosphere. The bending detection means is capable of detecting changes in the bending of the vibrated microcantilever in the monitored atmosphere coactively with the frequency detection means. The piezoelectric transducer is excited by an oscillator means which provides a signal driving the transducer at a resonance frequency inducing a predetermined order of resonance on the partially treated microcantilever. Upon insertion into a monitored atmosphere, molecules of the targeted chemical attach to the treated regions of the microcantilever resulting in a change in oscillating mass as well as a change in microcantilever spring constant thereby influencing the resonant frequency of the microcantilever oscillation. Furthermore, the molecular attachment of the target chemical to the treated regions induce areas of mechanical strain in the microcantilever consistent with themore » treated regions thereby influencing microcantilever bending. The rate at which the treated microcantilever accumulates the target chemical is a function of the target chemical concentration. Consequently, the extent of microcantilever oscillation frequency change and bending is related to the concentration of target chemical within the monitored atmosphere.« less

Inventors:
 [1];  [2]
  1. Knoxville, TN
  2. Oak Ridge, TN
Issue Date:
Research Org.:
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
OSTI Identifier:
871375
Patent Number(s):
5719324
Assignee:
Lockheed Martin Energy Systems, Inc. (Oak Ridge, TN)
Patent Classifications (CPCs):
G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
DOE Contract Number:  
AC05-84OR21400
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
microcantilever; sensor; improved; fabricated; attached; piezoelectric; transducer; partially; surface; treated; compound; selective; substance; substantially; exclusive; affinity; targeted; monitored; atmosphere; provided; frequency; detection; means; bending; capable; detecting; changes; resonance; vibrated; coactively; excited; oscillator; provides; signal; driving; inducing; predetermined; insertion; molecules; chemical; attach; regions; resulting; change; oscillating; mass; spring; constant; influencing; resonant; oscillation; furthermore; molecular; attachment; target; induce; mechanical; strain; consistent; rate; accumulates; function; concentration; consequently; extent; related; oscillation frequency; detection means; resonant frequency; piezoelectric transducer; detecting changes; resonance frequency; target chemical; microcantilever sensor; spring constant; chemical concentration; mechanical strain; surface treated; targeted chemical; frequency change; chemical attach; cantilever spring; /73/422/

Citation Formats

Thundat, Thomas G, and Wachter, Eric A. Microcantilever sensor. United States: N. p., 1998. Web.
Thundat, Thomas G, & Wachter, Eric A. Microcantilever sensor. United States.
Thundat, Thomas G, and Wachter, Eric A. Thu . "Microcantilever sensor". United States. https://www.osti.gov/servlets/purl/871375.
@article{osti_871375,
title = {Microcantilever sensor},
author = {Thundat, Thomas G and Wachter, Eric A},
abstractNote = {An improved microcantilever sensor is fabricated with at least one microcantilever attached to a piezoelectric transducer. The microcantilever is partially surface treated with a compound selective substance having substantially exclusive affinity for a targeted compound in a monitored atmosphere. The microcantilever sensor is also provided with a frequency detection means and a bending detection means. The frequency detection means is capable of detecting changes in the resonance frequency of the vibrated microcantilever in the monitored atmosphere. The bending detection means is capable of detecting changes in the bending of the vibrated microcantilever in the monitored atmosphere coactively with the frequency detection means. The piezoelectric transducer is excited by an oscillator means which provides a signal driving the transducer at a resonance frequency inducing a predetermined order of resonance on the partially treated microcantilever. Upon insertion into a monitored atmosphere, molecules of the targeted chemical attach to the treated regions of the microcantilever resulting in a change in oscillating mass as well as a change in microcantilever spring constant thereby influencing the resonant frequency of the microcantilever oscillation. Furthermore, the molecular attachment of the target chemical to the treated regions induce areas of mechanical strain in the microcantilever consistent with the treated regions thereby influencing microcantilever bending. The rate at which the treated microcantilever accumulates the target chemical is a function of the target chemical concentration. Consequently, the extent of microcantilever oscillation frequency change and bending is related to the concentration of target chemical within the monitored atmosphere.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1998},
month = {1}
}

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Works referenced in this record:

Adsorption‐induced surface stress and its effects on resonance frequency of microcantilevers
journal, April 1995


Erratum: A femtojoule calorimeter using micromechanical sensors [Rev. Sci. Instrum. 65 , 3793 (1994)]
journal, April 1995


Observation of a chemical reaction using a micromechanical sensor
journal, January 1994


Atomic Force Microscopy
journal, October 1990