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Title: Scanning fluorescent microthermal imaging apparatus and method

Abstract

A scanning fluorescent microthermal imaging (FMI) apparatus and method is disclosed, useful for integrated circuit (IC) failure analysis, that uses a scanned and focused beam from a laser to excite a thin fluorescent film disposed over the surface of the IC. By collecting fluorescent radiation from the film, and performing point-by-point data collection with a single-point photodetector, a thermal map of the IC is formed to measure any localized heating associated with defects in the IC.

Inventors:
 [1];  [1]
  1. Albuquerque, NM
Issue Date:
Research Org.:
Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
OSTI Identifier:
871312
Patent Number(s):
5705821
Assignee:
Sandia Corporation ()
Patent Classifications (CPCs):
G - PHYSICS G01 - MEASURING G01K - MEASURING TEMPERATURE
G - PHYSICS G01 - MEASURING G01B - MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
scanning; fluorescent; microthermal; imaging; apparatus; method; fmi; disclosed; useful; integrated; circuit; failure; analysis; scanned; focused; beam; laser; excite; film; disposed; surface; collecting; radiation; performing; point-by-point; data; collection; single-point; photodetector; thermal; map; formed; measure; localized; heating; associated; defects; localized heating; imaging apparatus; integrated circuit; data collection; failure analysis; focused beam; film disposed; scanning fluorescent; microthermal imaging; thermal imaging; fluorescent microthermal; thermal map; /250/

Citation Formats

Barton, Daniel L, and Tangyunyong, Paiboon. Scanning fluorescent microthermal imaging apparatus and method. United States: N. p., 1998. Web.
Barton, Daniel L, & Tangyunyong, Paiboon. Scanning fluorescent microthermal imaging apparatus and method. United States.
Barton, Daniel L, and Tangyunyong, Paiboon. Tue . "Scanning fluorescent microthermal imaging apparatus and method". United States. https://www.osti.gov/servlets/purl/871312.
@article{osti_871312,
title = {Scanning fluorescent microthermal imaging apparatus and method},
author = {Barton, Daniel L and Tangyunyong, Paiboon},
abstractNote = {A scanning fluorescent microthermal imaging (FMI) apparatus and method is disclosed, useful for integrated circuit (IC) failure analysis, that uses a scanned and focused beam from a laser to excite a thin fluorescent film disposed over the surface of the IC. By collecting fluorescent radiation from the film, and performing point-by-point data collection with a single-point photodetector, a thermal map of the IC is formed to measure any localized heating associated with defects in the IC.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1998},
month = {1}
}

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Works referenced in this record:

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