Scanning fluorescent microthermal imaging apparatus and method

Barton, Daniel L; Tangyunyong, Paiboon

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Title: Scanning fluorescent microthermal imaging apparatus and method

Abstract

A scanning fluorescent microthermal imaging (FMI) apparatus and method is disclosed, useful for integrated circuit (IC) failure analysis, that uses a scanned and focused beam from a laser to excite a thin fluorescent film disposed over the surface of the IC. By collecting fluorescent radiation from the film, and performing point-by-point data collection with a single-point photodetector, a thermal map of the IC is formed to measure any localized heating associated with defects in the IC.

Inventors:

Barton, Daniel L ^[1]; Tangyunyong, Paiboon ^[1]

Albuquerque, NM

Issue Date:: 1998-01-06

Research Org.:: Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)

OSTI Identifier:: 871312

Patent Number(s):: 5705821

Assignee:: Sandia Corporation ()

Patent Classifications (CPCs):: G - PHYSICS G01 - MEASURING G01B - MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS

G - PHYSICS G01 - MEASURING G01K - MEASURING TEMPERATURE

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G - PHYSICS G01 - MEASURING G01B - MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS
G01B11/20 - {using brittle lacquer}

G - PHYSICS G01 - MEASURING G01K - MEASURING TEMPERATURE
G01K11/20 - using thermoluminescent materials

Show less

DOE Contract Number:: AC04-94AL85000

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Subject:: scanning; fluorescent; microthermal; imaging; apparatus; method; fmi; disclosed; useful; integrated; circuit; failure; analysis; scanned; focused; beam; laser; excite; film; disposed; surface; collecting; radiation; performing; point-by-point; data; collection; single-point; photodetector; thermal; map; formed; measure; localized; heating; associated; defects; localized heating; imaging apparatus; integrated circuit; data collection; failure analysis; focused beam; film disposed; scanning fluorescent; microthermal imaging; thermal imaging; fluorescent microthermal; thermal map; /250/

Citation Formats


                    Barton, Daniel L, and Tangyunyong, Paiboon. Scanning fluorescent microthermal imaging apparatus and method.  United States: N. p., 1998. 
        Web.

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                    Barton, Daniel L, & Tangyunyong, Paiboon. Scanning fluorescent microthermal imaging apparatus and method.  United States.

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                    Barton, Daniel L, and Tangyunyong, Paiboon. Tue .  
        "Scanning fluorescent microthermal imaging apparatus and method".  United States.  https://www.osti.gov/servlets/purl/871312.

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@article{osti_871312,

  title        = {Scanning fluorescent microthermal imaging apparatus and method},

  author       = {Barton, Daniel L and Tangyunyong, Paiboon},

  abstractNote = {A scanning fluorescent microthermal imaging (FMI) apparatus and method is disclosed, useful for integrated circuit (IC) failure analysis, that uses a scanned and focused beam from a laser to excite a thin fluorescent film disposed over the surface of the IC. By collecting fluorescent radiation from the film, and performing point-by-point data collection with a single-point photodetector, a thermal map of the IC is formed to measure any localized heating associated with defects in the IC.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {1998},

  month        = {1}

}

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Works referenced in this record:

A Method of Detecting Hot Spots on Semiconductors using Liquid Crystals
conference, April 1981

Hiatt, John
19th International Reliability Physics Symposium
https://doi.org/10.1109/IRPS.1981.362984

Fluorescence of Europium Thenoyltrifluoroacetonate. I. Evaluation of Laser Threshold Parameters
journal, July 1963

Winston, H.; Marsh, O. J.; Suzuki, C. K.
The Journal of Chemical Physics, Vol. 39, Issue 2
https://doi.org/10.1063/1.1734239

Remote thermal imaging with 0.7‐μm spatial resolution using temperature‐dependent fluorescent thin flims
journal, January 1983

Kolodner, Paul; Tyson, J. Anthony
Applied Physics Letters, Vol. 42, Issue 1
https://doi.org/10.1063/1.93766

Quenching and Temperature Dependence of Fluorescence in Rare‐Earth Chelates
journal, June 1964

Bhaumik, M. L.
The Journal of Chemical Physics, Vol. 40, Issue 12
https://doi.org/10.1063/1.1725078

Microscopic fluorescent imaging of surface temperature profiles with 0.01 °C resolution
journal, May 1982

Kolodner, Paul; Tyson, J. Anthony
Applied Physics Letters, Vol. 40, Issue 9
https://doi.org/10.1063/1.93258

Intramolecular Energy Transfer in Rare Earth Chelates. Role of the Triplet State
journal, March 1961

Crosby, G. A.; Whan, R. E.; Alire, R. M.
The Journal of Chemical Physics, Vol. 34, Issue 3
https://doi.org/10.1063/1.1731670

Liquid Crystal Technique as a Failure Analysis Tool
conference, April 1980

Goel, Ajit; Gray, Andy
18th International Reliability Physics Symposium
https://doi.org/10.1109/IRPS.1980.362925

An integrating detector for serial scan thermal imaging
journal, January 1982

Elliott, C. T.; Day, D.; Wilson, D. J.
Infrared Physics, Vol. 22, Issue 1
https://doi.org/10.1016/0020-0891(82)90016-1

The Effect of Temperature on Fluorescence of Solutions
journal, January 1959

Bowen, E. J.; Sahu, J.
The Journal of Physical Chemistry, Vol. 63, Issue 1
https://doi.org/10.1021/j150571a003

Infrared Technology Fundamentals
journal, December 1976

Zissis, G. J.
Optical Engineering, Vol. 15, Issue 6
https://doi.org/10.1117/12.7972032

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Similar Records

Title: Scanning fluorescent microthermal imaging apparatus and method

Abstract

Citation Formats

A Method of Detecting Hot Spots on Semiconductors using Liquid Crystals conference, April 1981

Fluorescence of Europium Thenoyltrifluoroacetonate. I. Evaluation of Laser Threshold Parameters journal, July 1963

Remote thermal imaging with 0.7‐μm spatial resolution using temperature‐dependent fluorescent thin flims journal, January 1983

Quenching and Temperature Dependence of Fluorescence in Rare‐Earth Chelates journal, June 1964

Microscopic fluorescent imaging of surface temperature profiles with 0.01 °C resolution journal, May 1982

Intramolecular Energy Transfer in Rare Earth Chelates. Role of the Triplet State journal, March 1961

Liquid Crystal Technique as a Failure Analysis Tool conference, April 1980

An integrating detector for serial scan thermal imaging journal, January 1982

The Effect of Temperature on Fluorescence of Solutions journal, January 1959

Infrared Technology Fundamentals journal, December 1976

A Method of Detecting Hot Spots on Semiconductors using Liquid Crystals
conference, April 1981

Fluorescence of Europium Thenoyltrifluoroacetonate. I. Evaluation of Laser Threshold Parameters
journal, July 1963

Remote thermal imaging with 0.7‐μm spatial resolution using temperature‐dependent fluorescent thin flims
journal, January 1983

Quenching and Temperature Dependence of Fluorescence in Rare‐Earth Chelates
journal, June 1964

Microscopic fluorescent imaging of surface temperature profiles with 0.01 °C resolution
journal, May 1982

Intramolecular Energy Transfer in Rare Earth Chelates. Role of the Triplet State
journal, March 1961

Liquid Crystal Technique as a Failure Analysis Tool
conference, April 1980

An integrating detector for serial scan thermal imaging
journal, January 1982

The Effect of Temperature on Fluorescence of Solutions
journal, January 1959

Infrared Technology Fundamentals
journal, December 1976