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Title: Positioner with long travel in two dimensions

Abstract

A precision positioning system is provided which provides long travel in two of the linear dimensions, while using non-contact bearings for both a first subassembly which provides long travel in one of the linear dimension and a second subassembly which provides long travel in the second linear dimension. The first or upper subassembly is preferably a magnetic subassembly which, in addition to providing long travel, also compensates or positions in three rotary dimensions and in the third linear dimension. The second subassembly is preferably either an air bearing or magnetic subassembly and is normally used only to provide long travel. Angled surfaces may be provided for magnetic bearings and capacitive or other gap sensing probes may be mounted to the stage and ground flush with the bearing actuators to provide more precise gap measurements.

Inventors:
 [1];  [2]
  1. (Plaistow, NH)
  2. (Pelham, NH)
Issue Date:
Research Org.:
Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA
OSTI Identifier:
871283
Patent Number(s):
5699621
Application Number:
08/604,733
Assignee:
Massachusetts Institute of Technology (Cambridge, MA) SNL
DOE Contract Number:  
AJ4723
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
positioner; travel; dimensions; precision; positioning; provided; provides; linear; non-contact; bearings; subassembly; dimension; upper; preferably; magnetic; addition; providing; compensates; positions; rotary; third; air; bearing; normally; provide; angled; surfaces; capacitive; gap; sensing; probes; mounted; stage; ground; flush; actuators; precise; measurements; air bearing; magnetic bearings; magnetic bearing; sensing probe; linear dimension; linear dimensions; /33/

Citation Formats

Trumper, David L., and Williams, Mark E. Positioner with long travel in two dimensions. United States: N. p., 1997. Web.
Trumper, David L., & Williams, Mark E. Positioner with long travel in two dimensions. United States.
Trumper, David L., and Williams, Mark E. Tue . "Positioner with long travel in two dimensions". United States. https://www.osti.gov/servlets/purl/871283.
@article{osti_871283,
title = {Positioner with long travel in two dimensions},
author = {Trumper, David L. and Williams, Mark E.},
abstractNote = {A precision positioning system is provided which provides long travel in two of the linear dimensions, while using non-contact bearings for both a first subassembly which provides long travel in one of the linear dimension and a second subassembly which provides long travel in the second linear dimension. The first or upper subassembly is preferably a magnetic subassembly which, in addition to providing long travel, also compensates or positions in three rotary dimensions and in the third linear dimension. The second subassembly is preferably either an air bearing or magnetic subassembly and is normally used only to provide long travel. Angled surfaces may be provided for magnetic bearings and capacitive or other gap sensing probes may be mounted to the stage and ground flush with the bearing actuators to provide more precise gap measurements.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1997},
month = {12}
}

Patent:

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