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Title: Optical caliper with compensation for specimen deflection and method

An optical non-contact profilometry system and method provided by an optical caliper with matched optical sensors that are arranged conjugate to each other so that the surface profile and thickness of an article can be measured without using a fixed reference surface and while permitting the article to deflect in space within the acquisition range of the optical sensors. The output signals from the two optical sensors are algebraically added to compensate for any such deflection of the article and provide a so compensated signal, the balance and sign of which provides a measurement of the actual thickness of the article at the optical sensors.
Inventors:
 [1]
  1. (Knoxville, TN)
Issue Date:
OSTI Identifier:
871270
Assignee:
Lockheed Martin Energy Systems, Inc. (Oak Ridge, TN) ORNL
Patent Number(s):
US 5696589
Contract Number:
AC05-84OR21400
Research Org:
LOCKHEED MARTIN ENRGY SYST INC
Country of Publication:
United States
Language:
English
Subject:
optical; caliper; compensation; specimen; deflection; method; non-contact; profilometry; provided; matched; sensors; arranged; conjugate; surface; profile; thickness; article; measured; fixed; reference; permitting; deflect; space; acquisition; range; output; signals; algebraically; added; compensate; provide; compensated; signal; balance; provides; measurement; reference surface; surface profile; optical sensors; output signals; output signal; method provide; optical sensor; fixed reference; optical caliper; /356/250/