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Title: Using sputter coated glass to stabilize microstrip gas chambers

By sputter coating a thin-layer of low-resistive, electronically-conductive glass on various substrates (including quartz and ceramics, thin-film Pestov glass), microstrip gas chambers (MSGC) of high gain stability, low leakage current, and a high rate capability can be fabricated. This design can make the choice of substrate less important, save the cost of ion-implantation, and use less glass material.
  1. (Albany, CA)
Issue Date:
OSTI Identifier:
Regents of University of California (Oakland, CA) LBNL
Patent Number(s):
US 5675470
Research Org:
Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA
Country of Publication:
United States
sputter; coated; glass; stabilize; microstrip; gas; chambers; coating; thin-layer; low-resistive; electronically-conductive; various; substrates; including; quartz; ceramics; thin-film; pestov; msgc; stability; leakage; current; rate; capability; fabricated; design; choice; substrate; save; cost; ion-implantation; material; conductive glass; sputter coating; leakage current; gas chamber; sputter coated; various substrates; rate capability; glass material; coated glass; strip gas; microstrip gas; gas chambers; /361/