Boron containing multilayer coatings and method of fabrication

Makowiecki, Daniel M; Jankowski, Alan F

Title: Boron containing multilayer coatings and method of fabrication

Abstract

Hard coatings are fabricated from multilayer boron/boron carbide, boron carbide/cubic boron nitride, and boron/boron nitride/boron carbide, and the fabrication thereof involves magnetron sputtering in a selected atmosphere. These hard coatings may be applied to tools and engine and other parts, as well to reduce wear on tribological surfaces and electronic devices. These boron coatings contain no morphological growth features. For example, the boron and boron carbide used in forming the multilayers are formed in an inert (e.g. argon) atmosphere, while the cubic boron nitride is formed in a reactive (e.g. nitrogen) atmosphere. The multilayer boron/boron carbide, and boron carbide/cubic boron nitride is produced by depositing alternate layers of boron, cubic boron nitride or boron carbide, with the alternate layers having a thickness of 1 nanometer to 1 micrometer, and at least the interfaces of the layers may be of a discrete or a blended or graded composition.

Inventors:

Makowiecki, Daniel M ^[1]; Jankowski, Alan F ^[1]

Livermore, CA

Issue Date:: 1997-01-01

Research Org.:: Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)

OSTI Identifier:: 871154

Patent Number(s):: 5670252

Assignee:: Regents of University of California (Oakland, CA)

Patent Classifications (CPCs):: C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL

G - PHYSICS G21 - NUCLEAR PHYSICS G21K - TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR

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C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
C23C14/185 - {by cathodic sputtering}

G - PHYSICS G21 - NUCLEAR PHYSICS G21K - TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR
G21K2201/061 - characterised by a multilayer structure

C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
C23C14/3414 - {Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy}
C23C14/0635 - {Carbides}

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
Y10T428/265 - 1 mil or less

C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
C23C14/0647 - {Boron nitride}
C23C14/18 - on other inorganic substrates

B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
B82Y10/00 - Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic

G - PHYSICS G21 - NUCLEAR PHYSICS G21K - TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR
G21K2201/067 - Construction details
G21K1/062 - {Devices having a multilayer structure}

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DOE Contract Number:: W-7405-ENG-48

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Subject:: boron; containing; multilayer; coatings; method; fabrication; hard; fabricated; carbide; cubic; nitride; involves; magnetron; sputtering; selected; atmosphere; applied; tools; engine; reduce; wear; tribological; surfaces; electronic; devices; contain; morphological; growth; features; example; forming; multilayers; formed; inert; argon; reactive; nitrogen; produced; depositing; alternate; layers; thickness; nanometer; micrometer; interfaces; discrete; blended; graded; composition; multilayer coatings; magnetron sputter; morphological growth; multilayer coating; magnetron sputtering; cubic boron; boron containing; alternate layers; boron carbide; boron nitride; electronic devices; selected atmosphere; reduce wear; multilayer boron; hard coatings; growth features; electronic device; hard coating; graded composition; depositing alternate; involves magnetron; /428/359/

Citation Formats


                    Makowiecki, Daniel M, and Jankowski, Alan F. Boron containing multilayer coatings and method of fabrication.  United States: N. p., 1997. 
        Web.

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                    Makowiecki, Daniel M, & Jankowski, Alan F. Boron containing multilayer coatings and method of fabrication.  United States.

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                    Makowiecki, Daniel M, and Jankowski, Alan F. Wed .  
        "Boron containing multilayer coatings and method of fabrication".  United States.  https://www.osti.gov/servlets/purl/871154.

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@article{osti_871154,

  title        = {Boron containing multilayer coatings and method of fabrication},

  author       = {Makowiecki, Daniel M and Jankowski, Alan F},

  abstractNote = {Hard coatings are fabricated from multilayer boron/boron carbide, boron carbide/cubic boron nitride, and boron/boron nitride/boron carbide, and the fabrication thereof involves magnetron sputtering in a selected atmosphere. These hard coatings may be applied to tools and engine and other parts, as well to reduce wear on tribological surfaces and electronic devices. These boron coatings contain no morphological growth features. For example, the boron and boron carbide used in forming the multilayers are formed in an inert (e.g. argon) atmosphere, while the cubic boron nitride is formed in a reactive (e.g. nitrogen) atmosphere. The multilayer boron/boron carbide, and boron carbide/cubic boron nitride is produced by depositing alternate layers of boron, cubic boron nitride or boron carbide, with the alternate layers having a thickness of 1 nanometer to 1 micrometer, and at least the interfaces of the layers may be of a discrete or a blended or graded composition.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {1997},

  month        = {1}

}

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Works referenced in this record:

Magnetron sputtered boron films and Ti/B multilayer structures
journal, November 1990

Makowiecki, D. M.; Jankowski, A. F.; McKernan, M. A.
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 8, Issue 6
https://doi.org/10.1116/1.576419

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Title: Boron containing multilayer coatings and method of fabrication

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Citation Formats

Magnetron sputtered boron films and Ti/B multilayer structures journal, November 1990

Magnetron sputtered boron films and Ti/B multilayer structures
journal, November 1990