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Title: Moving zone Marangoni drying of wet objects using naturally evaporated solvent vapor

Abstract

A surface tension gradient driven flow (a Marangoni flow) is used to remove the thin film of water remaining on the surface of an object following rinsing. The process passively introduces by natural evaporation and diffusion of minute amounts of alcohol (or other suitable material) vapor in the immediate vicinity of a continuously refreshed meniscus of deionized water or another aqueous-based, nonsurfactant rinsing agent. Used in conjunction with cleaning, developing or wet etching application, rinsing coupled with Marangoni drying provides a single-step process for 1) cleaning, developing or etching, 2) rinsing, and 3) drying objects such as flat substrates or coatings on flat substrates without necessarily using heat, forced air flow, contact wiping, centrifugation or large amounts of flammable solvents. This process is useful in one-step cleaning and drying of large flat optical substrates, one-step developing/rinsing and drying or etching/rinsing/drying of large flat patterned substrates and flat panel displays during lithographic processing, and room-temperature rinsing/drying of other large parts, sheets or continuous rolls of material.

Inventors:
 [1]
  1. Oakley, CA
Issue Date:
Research Org.:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
OSTI Identifier:
871112
Patent Number(s):
5660642
Assignee:
Regents of University of California (Oakland, CA)
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
moving; zone; marangoni; drying; wet; naturally; evaporated; solvent; vapor; surface; tension; gradient; driven; flow; remove; film; water; remaining; following; rinsing; process; passively; introduces; natural; evaporation; diffusion; minute; amounts; alcohol; suitable; material; immediate; vicinity; continuously; refreshed; meniscus; deionized; aqueous-based; nonsurfactant; agent; conjunction; cleaning; developing; etching; application; coupled; provides; single-step; flat; substrates; coatings; necessarily; heat; forced; air; contact; wiping; centrifugation; flammable; solvents; useful; one-step; optical; patterned; panel; displays; lithographic; processing; room-temperature; sheets; continuous; rolls; optical substrates; forced air; suitable material; air flow; flat panel; surface tension; deionized water; optical substrate; panel displays; panel display; wet etching; water remaining; step process; solvent vapor; single-step process; patterned substrate; minute amounts; flat substrates; lithographic processing; /134/

Citation Formats

Britten, Jerald A. Moving zone Marangoni drying of wet objects using naturally evaporated solvent vapor. United States: N. p., 1997. Web.
Britten, Jerald A. Moving zone Marangoni drying of wet objects using naturally evaporated solvent vapor. United States.
Britten, Jerald A. Wed . "Moving zone Marangoni drying of wet objects using naturally evaporated solvent vapor". United States. https://www.osti.gov/servlets/purl/871112.
@article{osti_871112,
title = {Moving zone Marangoni drying of wet objects using naturally evaporated solvent vapor},
author = {Britten, Jerald A},
abstractNote = {A surface tension gradient driven flow (a Marangoni flow) is used to remove the thin film of water remaining on the surface of an object following rinsing. The process passively introduces by natural evaporation and diffusion of minute amounts of alcohol (or other suitable material) vapor in the immediate vicinity of a continuously refreshed meniscus of deionized water or another aqueous-based, nonsurfactant rinsing agent. Used in conjunction with cleaning, developing or wet etching application, rinsing coupled with Marangoni drying provides a single-step process for 1) cleaning, developing or etching, 2) rinsing, and 3) drying objects such as flat substrates or coatings on flat substrates without necessarily using heat, forced air flow, contact wiping, centrifugation or large amounts of flammable solvents. This process is useful in one-step cleaning and drying of large flat optical substrates, one-step developing/rinsing and drying or etching/rinsing/drying of large flat patterned substrates and flat panel displays during lithographic processing, and room-temperature rinsing/drying of other large parts, sheets or continuous rolls of material.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1997},
month = {1}
}

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