Method of forming a spacer for field emission flat panel displays
Abstract
Spacers for applications such as field emission flat panel displays and vacuum microelectronics, and which involves the application of aerogel/xerogel technology to the formation of the spacer. In a preferred approach the method uses a mold and mold release agent wherein the gel precursor is a liquid which can be applied to the mold filling holes which expose the substrate (either the baseplate or the faceplate). A release agent is applied to the mold prior to precursor application to ease removal of the mold after formation of the dielectric spacer. The shrinkage of the gel during solvent extraction also improves mold removal. The final spacer material is a good dielectric, such as silica, secured to the substrate.
- Inventors:
-
- Berkeley, CA
- Pleasanton, CA
- Issue Date:
- Research Org.:
- Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
- OSTI Identifier:
- 871103
- Patent Number(s):
- 5658832
- Assignee:
- Regents of University of California (Oakland, CA)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- DOE Contract Number:
- W-7405-ENG-48
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- method; forming; spacer; field; emission; flat; panel; displays; spacers; applications; vacuum; microelectronics; involves; application; aerogel; xerogel; technology; formation; preferred; approach; mold; release; agent; precursor; liquid; applied; filling; holes; expose; substrate; baseplate; faceplate; prior; ease; removal; dielectric; shrinkage; solvent; extraction; improves; final; material; silica; secured; solvent extraction; field emission; flat panel; panel displays; panel display; spacer material; emission flat; vacuum microelectronic; solvent extract; /264/427/445/
Citation Formats
Bernhardt, Anthony F, and Contolini, Robert J. Method of forming a spacer for field emission flat panel displays. United States: N. p., 1997.
Web.
Bernhardt, Anthony F, & Contolini, Robert J. Method of forming a spacer for field emission flat panel displays. United States.
Bernhardt, Anthony F, and Contolini, Robert J. Wed .
"Method of forming a spacer for field emission flat panel displays". United States. https://www.osti.gov/servlets/purl/871103.
@article{osti_871103,
title = {Method of forming a spacer for field emission flat panel displays},
author = {Bernhardt, Anthony F and Contolini, Robert J},
abstractNote = {Spacers for applications such as field emission flat panel displays and vacuum microelectronics, and which involves the application of aerogel/xerogel technology to the formation of the spacer. In a preferred approach the method uses a mold and mold release agent wherein the gel precursor is a liquid which can be applied to the mold filling holes which expose the substrate (either the baseplate or the faceplate). A release agent is applied to the mold prior to precursor application to ease removal of the mold after formation of the dielectric spacer. The shrinkage of the gel during solvent extraction also improves mold removal. The final spacer material is a good dielectric, such as silica, secured to the substrate.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1997},
month = {1}
}
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