Compact mass spectrometer for plasma discharge ion analysis
Abstract
A mass spectrometer and methods for mass spectrometry which are useful in characterizing a plasma. This mass spectrometer for determining type and quantity of ions present in a plasma is simple, compact, and inexpensive. It accomplishes mass analysis in a single step, rather than the usual two-step process comprised of ion extraction followed by mass filtering. Ions are captured by a measuring element placed in a plasma and accelerated by a known applied voltage. Captured ions are bent into near-circular orbits by a magnetic field such that they strike a collector, producing an electric current. Ion orbits vary with applied voltage and proton mass ratio of the ions, so that ion species may be identified. Current flow provides an indication of quantity of ions striking the collector.
- Inventors:
-
- Los Alamos, NM
- Issue Date:
- Research Org.:
- Los Alamos National Laboratory (LANL), Los Alamos, NM (United States)
- OSTI Identifier:
- 871061
- Patent Number(s):
- 5650618
- Assignee:
- Regents of University of California (Los Alamos, NM)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- DOE Contract Number:
- W-7405-ENG-36
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- compact; mass; spectrometer; plasma; discharge; analysis; methods; spectrometry; useful; characterizing; determining; type; quantity; simple; inexpensive; accomplishes; single; step; two-step; process; comprised; extraction; followed; filtering; captured; measuring; element; placed; accelerated; applied; voltage; bent; near-circular; orbits; magnetic; field; strike; collector; producing; electric; current; vary; proton; ratio; species; identified; flow; provides; indication; striking; mass filter; single step; plasma discharge; electric current; mass spectrometer; magnetic field; current flow; mass spectrometry; applied voltage; two-step process; step process; flow provides; mass analysis; element placed; /250/
Citation Formats
Tuszewski, Michel G. Compact mass spectrometer for plasma discharge ion analysis. United States: N. p., 1997.
Web.
Tuszewski, Michel G. Compact mass spectrometer for plasma discharge ion analysis. United States.
Tuszewski, Michel G. Wed .
"Compact mass spectrometer for plasma discharge ion analysis". United States. https://www.osti.gov/servlets/purl/871061.
@article{osti_871061,
title = {Compact mass spectrometer for plasma discharge ion analysis},
author = {Tuszewski, Michel G},
abstractNote = {A mass spectrometer and methods for mass spectrometry which are useful in characterizing a plasma. This mass spectrometer for determining type and quantity of ions present in a plasma is simple, compact, and inexpensive. It accomplishes mass analysis in a single step, rather than the usual two-step process comprised of ion extraction followed by mass filtering. Ions are captured by a measuring element placed in a plasma and accelerated by a known applied voltage. Captured ions are bent into near-circular orbits by a magnetic field such that they strike a collector, producing an electric current. Ion orbits vary with applied voltage and proton mass ratio of the ions, so that ion species may be identified. Current flow provides an indication of quantity of ions striking the collector.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1997},
month = {1}
}
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Works referenced in this record:
An omegatron mass spectrometer for plasma ion species analysis
journal, August 1990
- Wang, E. Y.; Schmitz, L.; Ra, Y.
- Review of Scientific Instruments, Vol. 61, Issue 8
Composition of the oxygen plasmas from two inductively coupled sources
journal, May 1995
- Tuszewski, M.; Scheuer, J. T.; Tobin, J. A.
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 13, Issue 3
Measurement of ion species ratio in the plasma source ion implantation process
journal, May 1993
- Tang, B. Y.; Fetherston, R. P.; Shamim, M.
- Journal of Applied Physics, Vol. 73, Issue 9
Mass spectrometric studies of positive ions in r.f. glow discharges
journal, April 1989
- Coburn, J. W.
- Thin Solid Films, Vol. 171, Issue 1