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Title: Compact mass spectrometer for plasma discharge ion analysis

Abstract

A mass spectrometer and methods for mass spectrometry which are useful in characterizing a plasma. This mass spectrometer for determining type and quantity of ions present in a plasma is simple, compact, and inexpensive. It accomplishes mass analysis in a single step, rather than the usual two-step process comprised of ion extraction followed by mass filtering. Ions are captured by a measuring element placed in a plasma and accelerated by a known applied voltage. Captured ions are bent into near-circular orbits by a magnetic field such that they strike a collector, producing an electric current. Ion orbits vary with applied voltage and proton mass ratio of the ions, so that ion species may be identified. Current flow provides an indication of quantity of ions striking the collector.

Inventors:
 [1]
  1. Los Alamos, NM
Issue Date:
Research Org.:
Los Alamos National Lab. (LANL), Los Alamos, NM (United States)
OSTI Identifier:
871061
Patent Number(s):
5650618
Assignee:
Regents of University of California (Los Alamos, NM)
Patent Classifications (CPCs):
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
DOE Contract Number:  
W-7405-ENG-36
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
compact; mass; spectrometer; plasma; discharge; analysis; methods; spectrometry; useful; characterizing; determining; type; quantity; simple; inexpensive; accomplishes; single; step; two-step; process; comprised; extraction; followed; filtering; captured; measuring; element; placed; accelerated; applied; voltage; bent; near-circular; orbits; magnetic; field; strike; collector; producing; electric; current; vary; proton; ratio; species; identified; flow; provides; indication; striking; mass filter; single step; plasma discharge; electric current; mass spectrometer; magnetic field; current flow; mass spectrometry; applied voltage; two-step process; step process; flow provides; mass analysis; element placed; /250/

Citation Formats

Tuszewski, Michel G. Compact mass spectrometer for plasma discharge ion analysis. United States: N. p., 1997. Web.
Tuszewski, Michel G. Compact mass spectrometer for plasma discharge ion analysis. United States.
Tuszewski, Michel G. Wed . "Compact mass spectrometer for plasma discharge ion analysis". United States. https://www.osti.gov/servlets/purl/871061.
@article{osti_871061,
title = {Compact mass spectrometer for plasma discharge ion analysis},
author = {Tuszewski, Michel G},
abstractNote = {A mass spectrometer and methods for mass spectrometry which are useful in characterizing a plasma. This mass spectrometer for determining type and quantity of ions present in a plasma is simple, compact, and inexpensive. It accomplishes mass analysis in a single step, rather than the usual two-step process comprised of ion extraction followed by mass filtering. Ions are captured by a measuring element placed in a plasma and accelerated by a known applied voltage. Captured ions are bent into near-circular orbits by a magnetic field such that they strike a collector, producing an electric current. Ion orbits vary with applied voltage and proton mass ratio of the ions, so that ion species may be identified. Current flow provides an indication of quantity of ions striking the collector.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1997},
month = {1}
}

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Works referenced in this record:

An omegatron mass spectrometer for plasma ion species analysis
journal, August 1990


Composition of the oxygen plasmas from two inductively coupled sources
journal, May 1995

  • Tuszewski, M.; Scheuer, J. T.; Tobin, J. A.
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 13, Issue 3
  • https://doi.org/10.1116/1.579838

Measurement of ion species ratio in the plasma source ion implantation process
journal, May 1993


Mass spectrometric studies of positive ions in r.f. glow discharges
journal, April 1989