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Title: Micromechanism linear actuator with capillary force sealing

A class of micromachine linear actuators whose function is based on gas driven pistons in which capillary forces are used to seal the gas behind the piston. The capillary forces also increase the amount of force transmitted from the gas pressure to the piston. In a major subclass of such devices, the gas bubble is produced by thermal vaporization of a working fluid. Because of their dependence on capillary forces for sealing, such devices are only practical on the sub-mm size scale, but in that regime they produce very large force times distance (total work) values.
  1. (Albuquerque, NM)
Issue Date:
OSTI Identifier:
Sandia Corporation (Albuquerque, NM) SNL
Patent Number(s):
US 5649423
Contract Number:
Research Org:
Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA
Country of Publication:
United States
micromechanism; linear; actuator; capillary; force; sealing; micromachine; actuators; function; based; gas; driven; pistons; forces; seal; piston; increase; amount; transmitted; pressure; major; subclass; devices; bubble; produced; thermal; vaporization; fluid; dependence; practical; sub-mm; size; scale; regime; produce; times; distance; total; values; linear actuators; linear actuator; capillary forces; thermal vapor; gas pressure; gas bubble; gas driven; /60/