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Title: Hydridosiloxanes as precursors to ceramic products

A method is provided for preparing ceramic precursors from hydridosiloxane starting materials and then pyrolyzing these precursors to give rise to silicious ceramic materials. Si--H bonds present in the hydridosiloxane starting materials are catalytically activated, and the activated hydrogen atoms may then be replaced with nonhydrogen substituents. These preceramic materials are pyrolyzed in a selected atmosphere to give the desired ceramic product. Ceramic products which may be prepared by this technique include silica, silicon oxynitride, silicon carbide, metal silicates, and mullite.
Inventors:
 [1];  [2];  [3]
  1. (San Jose, CA)
  2. (Piedmont, CA)
  3. (Palo Alto, CA)
Issue Date:
OSTI Identifier:
870979
Assignee:
SRI International (Menlo Park, CA) OSTI
Patent Number(s):
US 5635250
Contract Number:
N00014-85C-0668
Country of Publication:
United States
Language:
English
Subject:
hydridosiloxanes; precursors; ceramic; products; method; provided; preparing; hydridosiloxane; starting; materials; pyrolyzing; rise; silicious; si-h; bonds; catalytically; activated; hydrogen; atoms; replaced; nonhydrogen; substituents; preceramic; pyrolyzed; selected; atmosphere; desired; product; prepared; technique; silica; silicon; oxynitride; carbide; metal; silicates; mullite; ceramic products; ceramic product; hydrogen atoms; starting material; ceramic material; silicon carbide; ceramic materials; starting materials; ceramic precursor; hydrogen atom; silicon oxynitride; selected atmosphere; preparing ceramic; ceramic mater; /427/501/