Method of forming electrical pathways in indium-tin-oxide coatings
Abstract
An electrical device includes a substrate having an ITO coating thereon, a portion of which is conductive and defines at least one electrical pathway, and the balance of the ITO being insulative. The device is made by the following general steps: a. providing a substrate having a conductive ITO coating on at least one surface thereof; b. rendering a preselected portion of the coating of conductive ITO insulative, leaving the remaining portion of conductive ITO as at least one electrical pathway.
- Inventors:
-
- Knoxville, TN
- Issue Date:
- Research Org.:
- Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
- OSTI Identifier:
- 870849
- Patent Number(s):
- 5607731
- Assignee:
- Lockheed Martin Energy Systems, Inc. (Oak Ridge, TN)
- Patent Classifications (CPCs):
-
G - PHYSICS G02 - OPTICS G02F - DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
- DOE Contract Number:
- AC05-84OR21400
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- method; forming; electrical; pathways; indium-tin-oxide; coatings; device; substrate; ito; coating; thereon; portion; conductive; defines; pathway; balance; insulative; following; steps; providing; surface; rendering; preselected; leaving; remaining; coating thereon; electrical pathway; oxide coating; remaining portion; selected portion; electrical path; electrical device; forming electrical; ito coating; oxide coatings; indium-tin-oxide coatings; preselected portion; electrical pathways; /427/
Citation Formats
Haynes, Tony E. Method of forming electrical pathways in indium-tin-oxide coatings. United States: N. p., 1997.
Web.
Haynes, Tony E. Method of forming electrical pathways in indium-tin-oxide coatings. United States.
Haynes, Tony E. Wed .
"Method of forming electrical pathways in indium-tin-oxide coatings". United States. https://www.osti.gov/servlets/purl/870849.
@article{osti_870849,
title = {Method of forming electrical pathways in indium-tin-oxide coatings},
author = {Haynes, Tony E},
abstractNote = {An electrical device includes a substrate having an ITO coating thereon, a portion of which is conductive and defines at least one electrical pathway, and the balance of the ITO being insulative. The device is made by the following general steps: a. providing a substrate having a conductive ITO coating on at least one surface thereof; b. rendering a preselected portion of the coating of conductive ITO insulative, leaving the remaining portion of conductive ITO as at least one electrical pathway.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1997},
month = {1}
}
Save to My Library
You must Sign In or Create an Account in order to save documents to your library.
Works referenced in this record:
Surface reconstructions of oxygen deficient SnO2(110)
journal, December 1989
- Cox, David F.; Fryberger, Teresa B.; Semancik, Steve
- Surface Science, Vol. 224, Issue 1-3
Studies of H+2 implantation into indium-tin oxide films
journal, February 1989
- Serikawa, Tadashi; Shirai, Seiiti
- Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 37-38
Donor generation from native defects induced by In + implantation into tin‐doped indium oxide
journal, March 1995
- Haynes, Tony E.; Shigesato, Yuzo
- Journal of Applied Physics, Vol. 77, Issue 6
Study of the effect of ion implantation on the electrical and microstructural properties of tin‐doped indium oxide thin films
journal, April 1993
- Shigesato, Yuzo; Paine, David C.; Haynes, T. E.
- Journal of Applied Physics, Vol. 73, Issue 8