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Title: Flow-through ion beam source

A method and an apparatus for forming a charge neutral ion beam which is useful in producing thin films of material on electrically conductive or non-conductive substrates are provided.
Inventors:
 [1]
  1. (Los Alamos, NM)
Issue Date:
OSTI Identifier:
870819
Assignee:
Regents of University of California, Office of Technology (Alameda, CA) LANL
Patent Number(s):
US 5601654
Contract Number:
W-7405-ENG-36
Research Org:
Los Alamos National Laboratory (LANL), Los Alamos, NM
Country of Publication:
United States
Language:
English
Subject:
flow-through; beam; source; method; apparatus; forming; charge; neutral; useful; producing; films; material; electrically; conductive; non-conductive; substrates; provided; conductive substrate; electrically conductive; beam source; non-conductive substrate; charge neutral; non-conductive substrates; /118/156/250/427/438/