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Title: Precision non-contact polishing tool

A non-contact polishing tool that combines two orthogonal slurry flow geometries to provide flexibility in altering the shape of the removal footprint. By varying the relative contributions of the two flow geometries, the footprint shape can be varied between the characteristic shapes corresponding to the two independent flow regimes. In addition, the tool can include a pressure activated means by which the shape of the brim of the tool can be varied. The tool can be utilized in various applications, such as x-ray optical surfaces, x-ray lithography, lenses, etc., where stringent shape and finish tolerances are required.
Inventors:
 [1]
  1. (Livermore, CA)
Issue Date:
OSTI Identifier:
870767
Assignee:
Regents of University of California (Oakland, CA) LLNL
Patent Number(s):
US 5591068
Contract Number:
W-7405-ENG-48
Research Org:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Country of Publication:
United States
Language:
English
Subject:
precision; non-contact; polishing; tool; combines; orthogonal; slurry; flow; geometries; provide; flexibility; altering; shape; removal; footprint; varying; relative; contributions; varied; characteristic; shapes; corresponding; independent; regimes; addition; pressure; activated; means; brim; utilized; various; applications; x-ray; optical; surfaces; lithography; lenses; etc; stringent; finish; tolerances; required; flow regime; x-ray lithography; various applications; optical surfaces; slurry flow; optical surface; non-contact polishing; flow geometries; x-ray optical; pressure activated; polishing tool; /451/

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