System for monitoring the growth of crystalline films on stationary substrates
Abstract
A system for monitoring the growth of crystalline films on stationary or rotating substrates includes a combination of some or all of the elements including a photodiode sensor for detecting the intensity of incoming light and converting it to a measurable current, a lens for focusing the RHEED pattern emanating from the phosphor screen onto the photodiode, an interference filter for filtering out light other than that which emanates from the phosphor screen, a current amplifier for amplifying and convening the current produced by the photodiode into a voltage, a computer for receiving the amplified photodiode current for RHEED data analysis, and a graphite impregnated triax cable for improving the signal to noise ratio obtained while sampling a stationary or rotating substrate. A rotating stage for supporting the substrate with diametrically positioned electron beam apertures and an optically encoded shaft can also be used to accommodate rotation of the substrate during measurement.
- Inventors:
-
- Lakewood, CO
- Issue Date:
- Research Org.:
- Midwest Research Institute (Kansas City, MI)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 870756
- Patent Number(s):
- 5588995
- Assignee:
- Midwest Research Institute (Kansas City, MI)
- Patent Classifications (CPCs):
-
C - CHEMISTRY C30 - CRYSTAL GROWTH C30B - SINGLE-CRYSTAL-GROWTH
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- DOE Contract Number:
- AC02-83CH10093
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- monitoring; growth; crystalline; films; stationary; substrates; rotating; combination; elements; including; photodiode; sensor; detecting; intensity; incoming; light; converting; measurable; current; lens; focusing; rheed; pattern; emanating; phosphor; screen; interference; filter; filtering; emanates; amplifier; amplifying; convening; produced; voltage; computer; receiving; amplified; data; analysis; graphite; impregnated; triax; cable; improving; signal; noise; ratio; obtained; sampling; substrate; stage; supporting; diametrically; positioned; electron; beam; apertures; optically; encoded; shaft; accommodate; rotation; measurement; rotating substrate; phosphor screen; current produced; data analysis; crystalline films; incoming light; interference filter; electron beam; elements including; noise ratio; current amplifier; rotating substrates; stationary substrates; photodiode sensor; /117/118/
Citation Formats
Sheldon, Peter. System for monitoring the growth of crystalline films on stationary substrates. United States: N. p., 1996.
Web.
Sheldon, Peter. System for monitoring the growth of crystalline films on stationary substrates. United States.
Sheldon, Peter. Mon .
"System for monitoring the growth of crystalline films on stationary substrates". United States. https://www.osti.gov/servlets/purl/870756.
@article{osti_870756,
title = {System for monitoring the growth of crystalline films on stationary substrates},
author = {Sheldon, Peter},
abstractNote = {A system for monitoring the growth of crystalline films on stationary or rotating substrates includes a combination of some or all of the elements including a photodiode sensor for detecting the intensity of incoming light and converting it to a measurable current, a lens for focusing the RHEED pattern emanating from the phosphor screen onto the photodiode, an interference filter for filtering out light other than that which emanates from the phosphor screen, a current amplifier for amplifying and convening the current produced by the photodiode into a voltage, a computer for receiving the amplified photodiode current for RHEED data analysis, and a graphite impregnated triax cable for improving the signal to noise ratio obtained while sampling a stationary or rotating substrate. A rotating stage for supporting the substrate with diametrically positioned electron beam apertures and an optically encoded shaft can also be used to accommodate rotation of the substrate during measurement.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Mon Jan 01 00:00:00 EST 1996},
month = {Mon Jan 01 00:00:00 EST 1996}
}