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Title: System for monitoring the growth of crystalline films on stationary substrates

A system for monitoring the growth of crystalline films on stationary or rotating substrates includes a combination of some or all of the elements including a photodiode sensor for detecting the intensity of incoming light and converting it to a measurable current, a lens for focusing the RHEED pattern emanating from the phosphor screen onto the photodiode, an interference filter for filtering out light other than that which emanates from the phosphor screen, a current amplifier for amplifying and convening the current produced by the photodiode into a voltage, a computer for receiving the amplified photodiode current for RHEED data analysis, and a graphite impregnated triax cable for improving the signal to noise ratio obtained while sampling a stationary or rotating substrate. A rotating stage for supporting the substrate with diametrically positioned electron beam apertures and an optically encoded shaft can also be used to accommodate rotation of the substrate during measurement.
Inventors:
 [1]
  1. (Lakewood, CO)
Issue Date:
OSTI Identifier:
870756
Assignee:
Midwest Research Institute (Kansas City, MI) CHO
Patent Number(s):
US 5588995
Contract Number:
AC02-83CH10093
Research Org:
Midwest Research Institute (Kansas City, MI)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
monitoring; growth; crystalline; films; stationary; substrates; rotating; combination; elements; including; photodiode; sensor; detecting; intensity; incoming; light; converting; measurable; current; lens; focusing; rheed; pattern; emanating; phosphor; screen; interference; filter; filtering; emanates; amplifier; amplifying; convening; produced; voltage; computer; receiving; amplified; data; analysis; graphite; impregnated; triax; cable; improving; signal; noise; ratio; obtained; sampling; substrate; stage; supporting; diametrically; positioned; electron; beam; apertures; optically; encoded; shaft; accommodate; rotation; measurement; rotating substrate; phosphor screen; current produced; data analysis; crystalline films; incoming light; interference filter; electron beam; elements including; noise ratio; current amplifier; rotating substrates; stationary substrates; photodiode sensor; /117/118/