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Title: Porcelain-coated antenna for radio-frequency driven plasma source

Abstract

A new porcelain-enamel coated antenna creates a clean plasma for volume or surface-conversion ion sources. The porcelain-enamel coating is hard, electrically insulating, long lasting, non fragile, and resistant to puncture by high energy ions in the plasma. Plasma and ion production using the porcelain enamel coated antenna is uncontaminated with filament or extraneous metal ion because the porcelain does not evaporate and is not sputtered into the plasma during operation. Ion beams produced using the new porcelain-enamel coated antenna are useful in ion implantation, high energy accelerators, negative, positive, or neutral beam applications, fusion, and treatment of chemical or radioactive waste for disposal. For ion implantation, the appropriate species ion beam generated with the inventive antenna will penetrate large or small, irregularly shaped conducting objects with a narrow implantation profile.

Inventors:
 [1];  [2];  [3]
  1. Hercules, CA
  2. Kensington, CA
  3. Fremont, CA
Issue Date:
Research Org.:
Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA
OSTI Identifier:
870753
Patent Number(s):
5587226
Assignee:
Regents, University of California (Oakland, CA)
DOE Contract Number:  
AC03-76SF00098
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
porcelain-coated; antenna; radio-frequency; driven; plasma; source; porcelain-enamel; coated; creates; clean; volume; surface-conversion; sources; coating; hard; electrically; insulating; lasting; fragile; resistant; puncture; energy; production; porcelain; enamel; uncontaminated; filament; extraneous; metal; evaporate; sputtered; operation; beams; produced; useful; implantation; accelerators; negative; positive; neutral; beam; applications; fusion; treatment; chemical; radioactive; waste; disposal; appropriate; species; generated; inventive; penetrate; irregularly; shaped; conducting; narrow; profile; porcelain enamel; irregularly shaped; plasma source; electrically insulating; radioactive waste; neutral beam; coated antenna; beam generated; enamel coating; /428/

Citation Formats

Leung, Ka-Ngo, Wells, Russell P, and Craven, Glen E. Porcelain-coated antenna for radio-frequency driven plasma source. United States: N. p., 1996. Web.
Leung, Ka-Ngo, Wells, Russell P, & Craven, Glen E. Porcelain-coated antenna for radio-frequency driven plasma source. United States.
Leung, Ka-Ngo, Wells, Russell P, and Craven, Glen E. Mon . "Porcelain-coated antenna for radio-frequency driven plasma source". United States. https://www.osti.gov/servlets/purl/870753.
@article{osti_870753,
title = {Porcelain-coated antenna for radio-frequency driven plasma source},
author = {Leung, Ka-Ngo and Wells, Russell P and Craven, Glen E},
abstractNote = {A new porcelain-enamel coated antenna creates a clean plasma for volume or surface-conversion ion sources. The porcelain-enamel coating is hard, electrically insulating, long lasting, non fragile, and resistant to puncture by high energy ions in the plasma. Plasma and ion production using the porcelain enamel coated antenna is uncontaminated with filament or extraneous metal ion because the porcelain does not evaporate and is not sputtered into the plasma during operation. Ion beams produced using the new porcelain-enamel coated antenna are useful in ion implantation, high energy accelerators, negative, positive, or neutral beam applications, fusion, and treatment of chemical or radioactive waste for disposal. For ion implantation, the appropriate species ion beam generated with the inventive antenna will penetrate large or small, irregularly shaped conducting objects with a narrow implantation profile.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1996},
month = {1}
}

Patent:

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