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Title: Large area, surface discharge pumped, vacuum ultraviolet light source

Large area, surface discharge pumped, vacuum ultraviolet (VUV) light source. A contamination-free VUV light source having a 225 cm.sup.2 emission area in the 240-340 nm region of the electromagnetic spectrum with an average output power in this band of about 2 J/cm.sup.2 at a wall-plug efficiency of approximately 5% is described. Only ceramics and metal parts are employed in this surface discharge source. Because of the contamination-free, high photon energy and flux, and short pulse characteristics of the source, it is suitable for semiconductor and flat panel display material processing.
 [1];  [2]
  1. (Santa Fe, NM)
  2. (Los Alamos, NM)
Issue Date:
OSTI Identifier:
Regents of University of California (Alameda, CA) LANL
Patent Number(s):
US 5585641
Contract Number:
Research Org:
Los Alamos National Laboratory (LANL), Los Alamos, NM
Country of Publication:
United States
surface; discharge; pumped; vacuum; ultraviolet; light; source; vuv; contamination-free; 225; cm; emission; 240-340; nm; region; electromagnetic; spectrum; average; output; power; band; wall-plug; efficiency; approximately; described; ceramics; metal; employed; photon; energy; flux; pulse; characteristics; suitable; semiconductor; flat; panel; display; material; processing; material processing; photon energy; vacuum ultraviolet; ultraviolet light; light source; output power; flat panel; panel display; surface discharge; vuv light; electromagnetic spectrum; pulse characteristics; discharge source; charge pump; violet light; discharge pumped; /250/