skip to main content
DOE Patents title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Large area, surface discharge pumped, vacuum ultraviolet light source

Abstract

Large area, surface discharge pumped, vacuum ultraviolet (VUV) light source. A contamination-free VUV light source having a 225 cm.sup.2 emission area in the 240-340 nm region of the electromagnetic spectrum with an average output power in this band of about 2 J/cm.sup.2 at a wall-plug efficiency of approximately 5% is described. Only ceramics and metal parts are employed in this surface discharge source. Because of the contamination-free, high photon energy and flux, and short pulse characteristics of the source, it is suitable for semiconductor and flat panel display material processing.

Inventors:
 [1];  [2]
  1. Santa Fe, NM
  2. Los Alamos, NM
Issue Date:
Research Org.:
Los Alamos National Laboratory (LANL), Los Alamos, NM
OSTI Identifier:
870740
Patent Number(s):
5585641
Assignee:
Regents of University of California (Alameda, CA)
DOE Contract Number:  
W-7405-ENG-36
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
surface; discharge; pumped; vacuum; ultraviolet; light; source; vuv; contamination-free; 225; cm; emission; 240-340; nm; region; electromagnetic; spectrum; average; output; power; band; wall-plug; efficiency; approximately; described; ceramics; metal; employed; photon; energy; flux; pulse; characteristics; suitable; semiconductor; flat; panel; display; material; processing; material processing; photon energy; vacuum ultraviolet; ultraviolet light; light source; output power; flat panel; panel display; surface discharge; vuv light; electromagnetic spectrum; pulse characteristics; discharge source; charge pump; violet light; discharge pumped; /250/

Citation Formats

Sze, Robert C, and Quigley, Gerard P. Large area, surface discharge pumped, vacuum ultraviolet light source. United States: N. p., 1996. Web.
Sze, Robert C, & Quigley, Gerard P. Large area, surface discharge pumped, vacuum ultraviolet light source. United States.
Sze, Robert C, and Quigley, Gerard P. Mon . "Large area, surface discharge pumped, vacuum ultraviolet light source". United States. https://www.osti.gov/servlets/purl/870740.
@article{osti_870740,
title = {Large area, surface discharge pumped, vacuum ultraviolet light source},
author = {Sze, Robert C and Quigley, Gerard P},
abstractNote = {Large area, surface discharge pumped, vacuum ultraviolet (VUV) light source. A contamination-free VUV light source having a 225 cm.sup.2 emission area in the 240-340 nm region of the electromagnetic spectrum with an average output power in this band of about 2 J/cm.sup.2 at a wall-plug efficiency of approximately 5% is described. Only ceramics and metal parts are employed in this surface discharge source. Because of the contamination-free, high photon energy and flux, and short pulse characteristics of the source, it is suitable for semiconductor and flat panel display material processing.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1996},
month = {1}
}

Patent:

Save / Share: