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Title: Microminiature gas chromatograph

A microminiature gas chromatograph (.mu.GC) comprising a least one silicon wafer, a gas injector, a column, and a detector. The gas injector has a normally closed valve for introducing a mobile phase including a sample gas in a carrier gas. The valve is fully disposed in the silicon wafer(s). The column is a microcapillary in silicon crystal with a stationary phase and is mechanically connected to receive the mobile phase from the gas injector for the molecular separation of compounds in the sample gas. The detector is mechanically connected to the column for the analysis of the separated compounds of sample gas with electronic means, e.g., ion cell, field emitter and PIN diode.
  1. (Antioch, CA)
Issue Date:
OSTI Identifier:
Regents of University of California (Oakland, CA) LLNL
Patent Number(s):
US 5583281
Contract Number:
Research Org:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Country of Publication:
United States
microminiature; gas; chromatograph; gc; comprising; silicon; wafer; injector; column; detector; normally; closed; valve; introducing; mobile; phase; including; sample; carrier; disposed; microcapillary; crystal; stationary; mechanically; connected; receive; molecular; separation; compounds; analysis; separated; electronic; means; cell; field; emitter; diode; mobile phase; silicon crystal; mechanically connected; normally closed; carrier gas; silicon wafer; sample gas; field emitter; gas chromatograph; phase including; electronic means; stationary phase; gas injector; molecular separation; microminiature gas; mechanically connect; closed valve; normally close; /73/