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Title: Optical processing furnace with quartz muffle and diffuser plate

An optical furnace for annealing a process wafer comprising a source of optical energy, a quartz muffle having a door to hold the wafer for processing, and a quartz diffuser plate to diffuse the light impinging on the quartz muffle; a feedback system with a light sensor located in the wall of the muffle is also provided for controlling the source of optical energy.
  1. (Denver, CO)
Issue Date:
OSTI Identifier:
Midwest Research Institute (Kansas City, MO) CHO
Patent Number(s):
US 5577157
Contract Number:
Research Org:
Midwest Research Institute (Kansas City, MO)
Sponsoring Org:
Country of Publication:
United States
optical; processing; furnace; quartz; muffle; diffuser; plate; annealing; process; wafer; comprising; source; energy; door; hold; diffuse; light; impinging; feedback; sensor; located; wall; provided; controlling; quartz muffle; diffuser plate; light sensor; optical energy; optical furnace; optical processing; quartz diffuser; light impinging; wafer comprising; optical process; processing furnace; process wafer; /392/118/216/219/250/359/427/438/