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Title: Acoustic wave (AW) based moisture sensor for use with corrosive gases

Moisture corrosive gas stream is measured as a function of the difference in resonant frequencies between two acoustic wave (AW) devices, each with a film which accepts at least one of the components of the gas stream. One AW is located in the gas stream while the other is located outside the gas stream but in the same thermal environment. In one embodiment, the film is a hydrophilic material such as SiO.sub.2. In another embodiment, the SiO.sub.2 is covered with another film which is impermeable to the corrosive gas, such that the AW device in the gas stream measures only the water vapor. In yet another embodiment, the film comprises polyethylene oxide which is hydrophobic and measures only the partial pressure of the corrosive gas. Other embodiments allow for compensation of drift in the system.
Inventors:
 [1];  [2];  [3]
  1. (Los Lunas, NM)
  2. (Cedar Crest, NM)
  3. (Albuquerque, NM)
Issue Date:
OSTI Identifier:
870677
Assignee:
Sandia Corporation (Albuquerque, NM) SNL
Patent Number(s):
US 5571944
Contract Number:
AC04-76DP00789
Research Org:
AT & T CORP
Country of Publication:
United States
Language:
English
Subject:
acoustic; wave; based; moisture; sensor; corrosive; gases; gas; stream; measured; function; difference; resonant; frequencies; devices; film; accepts; components; located; outside; thermal; environment; embodiment; hydrophilic; material; sio; covered; impermeable; device; measures; water; vapor; comprises; polyethylene; oxide; hydrophobic; partial; pressure; embodiments; allow; compensation; drift; acoustic wave; water vapor; gas stream; partial pressure; located outside; film comprises; polyethylene oxide; corrosive gases; resonant frequencies; comprises poly; moisture sensor; corrosive gas; /73/310/