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Title: Broad beam ion implanter

Abstract

An ion implantation device for creating a large diameter, homogeneous, ion beam is described, as well as a method for creating same, wherein the device is characterized by extraction of a diverging ion beam and its conversion by ion beam optics to an essentially parallel ion beam. The device comprises a plasma or ion source, an anode and exit aperture, an extraction electrode, a divergence-limiting electrode and an acceleration electrode, as well as the means for connecting a voltage supply to the electrodes.

Inventors:
 [1]
  1. (Hercules, CA)
Issue Date:
Research Org.:
Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA
OSTI Identifier:
870632
Patent Number(s):
5563418
Assignee:
Regents, University of California (Oakland, CA) LBNL
DOE Contract Number:  
AC03-76SF00098
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
broad; beam; implanter; implantation; device; creating; diameter; homogeneous; described; method; characterized; extraction; diverging; conversion; optics; essentially; parallel; comprises; plasma; source; anode; exit; aperture; electrode; divergence-limiting; acceleration; means; connecting; voltage; supply; electrodes; voltage supply; device comprises; exit aperture; extraction electrode; essentially parallel; /250/

Citation Formats

Leung, Ka-Ngo. Broad beam ion implanter. United States: N. p., 1996. Web.
Leung, Ka-Ngo. Broad beam ion implanter. United States.
Leung, Ka-Ngo. Mon . "Broad beam ion implanter". United States. https://www.osti.gov/servlets/purl/870632.
@article{osti_870632,
title = {Broad beam ion implanter},
author = {Leung, Ka-Ngo},
abstractNote = {An ion implantation device for creating a large diameter, homogeneous, ion beam is described, as well as a method for creating same, wherein the device is characterized by extraction of a diverging ion beam and its conversion by ion beam optics to an essentially parallel ion beam. The device comprises a plasma or ion source, an anode and exit aperture, an extraction electrode, a divergence-limiting electrode and an acceleration electrode, as well as the means for connecting a voltage supply to the electrodes.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1996},
month = {1}
}

Patent:

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