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Title: Magnetic lens apparatus for a low-voltage high-resolution electron microscope

A lens apparatus in which a beam of charged particles of low accelerating voltage is brought to a focus by a magnetic field, the lens being situated behind the target position. The lens comprises an electrically-conducting coil arranged around the axis of the beam and a magnetic pole piece extending along the axis of the beam at least within the space surrounded by the coil. The lens apparatus comprises the sole focusing lens for high-resolution imaging in a low-voltage scanning electron microscope.
Inventors:
 [1]
  1. (Palos Park, IL)
Issue Date:
OSTI Identifier:
870631
Assignee:
Arch Development Corporation (Chicago, IL) ANL
Patent Number(s):
US 5563415
Contract Number:
FG02-86ER60437
Research Org:
Argonne National Laboratory (ANL), Argonne, IL
Country of Publication:
United States
Language:
English
Subject:
magnetic; lens; apparatus; low-voltage; high-resolution; electron; microscope; beam; charged; particles; accelerating; voltage; brought; focus; field; situated; target; position; comprises; electrically-conducting; coil; arranged; axis; pole; piece; extending; space; surrounded; sole; focusing; imaging; scanning; scanning electron; magnetic lens; electron microscope; focusing lens; apparatus comprises; charged particles; magnetic field; charged particle; lens apparatus; resolution imaging; apparatus comprise; target position; pole piece; accelerating voltage; magnetic pole; /250/