Magnetic lens apparatus for a low-voltage high-resolution electron microscope
Abstract
A lens apparatus in which a beam of charged particles of low accelerating voltage is brought to a focus by a magnetic field, the lens being situated behind the target position. The lens comprises an electrically-conducting coil arranged around the axis of the beam and a magnetic pole piece extending along the axis of the beam at least within the space surrounded by the coil. The lens apparatus comprises the sole focusing lens for high-resolution imaging in a low-voltage scanning electron microscope.
- Inventors:
-
- Palos Park, IL
- Issue Date:
- Research Org.:
- Argonne National Laboratory (ANL), Argonne, IL (United States)
- OSTI Identifier:
- 870631
- Patent Number(s):
- 5563415
- Assignee:
- Arch Development Corporation (Chicago, IL)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- DOE Contract Number:
- FG02-86ER60437
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- magnetic; lens; apparatus; low-voltage; high-resolution; electron; microscope; beam; charged; particles; accelerating; voltage; brought; focus; field; situated; target; position; comprises; electrically-conducting; coil; arranged; axis; pole; piece; extending; space; surrounded; sole; focusing; imaging; scanning; scanning electron; magnetic lens; electron microscope; focusing lens; apparatus comprises; charged particles; magnetic field; charged particle; lens apparatus; resolution imaging; apparatus comprise; target position; pole piece; accelerating voltage; magnetic pole; /250/
Citation Formats
Crewe, Albert V. Magnetic lens apparatus for a low-voltage high-resolution electron microscope. United States: N. p., 1996.
Web.
Crewe, Albert V. Magnetic lens apparatus for a low-voltage high-resolution electron microscope. United States.
Crewe, Albert V. Mon .
"Magnetic lens apparatus for a low-voltage high-resolution electron microscope". United States. https://www.osti.gov/servlets/purl/870631.
@article{osti_870631,
title = {Magnetic lens apparatus for a low-voltage high-resolution electron microscope},
author = {Crewe, Albert V},
abstractNote = {A lens apparatus in which a beam of charged particles of low accelerating voltage is brought to a focus by a magnetic field, the lens being situated behind the target position. The lens comprises an electrically-conducting coil arranged around the axis of the beam and a magnetic pole piece extending along the axis of the beam at least within the space surrounded by the coil. The lens apparatus comprises the sole focusing lens for high-resolution imaging in a low-voltage scanning electron microscope.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1996},
month = {1}
}
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Works referenced in this record:
Limits of electron probe formation
journal, May 1995
- Crewe, A. V.
- Journal of Microscopy, Vol. 178, Issue 2