DOE Patents title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Substrate heater for thin film deposition

Abstract

A substrate heater for thin film deposition of metallic oxides upon a target substrate configured as a disk including means for supporting in a predetermined location a target substrate configured as a disk, means for rotating the target substrate within the support means, means for heating the target substrate within the support means, the heating means about the support means and including a pair of heating elements with one heater element situated on each side of the predetermined location for the target substrate, with one heater element defining an opening through which desired coating material can enter for thin film deposition and with the heating means including an opening slot through which the target substrate can be entered into the support means, and, optionally a means for thermal shielding of the heating means from surrounding environment is disclosed.

Inventors:
 [1]
  1. 111 Beryl St., Los Alamos, NM 87544
Issue Date:
Research Org.:
Los Alamos National Lab. (LANL), Los Alamos, NM (United States)
OSTI Identifier:
870596
Patent Number(s):
5554224
Assignee:
Foltyn, Steve R. (111 Beryl St., Los Alamos, NM 87544)
Patent Classifications (CPCs):
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
DOE Contract Number:  
W-7405-ENG-36
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
substrate; heater; film; deposition; metallic; oxides; target; configured; disk; including; means; supporting; predetermined; location; rotating; support; heating; pair; elements; element; situated; defining; desired; coating; material; enter; slot; entered; optionally; thermal; shielding; surrounding; environment; disclosed; surrounding environment; including means; means including; heating elements; film deposition; coating material; heating means; heating element; support means; predetermined location; target substrate; metallic oxides; heater element; substrate configured; substrate heater; metallic oxide; thermal shield; disk including; /118/204/

Citation Formats

Foltyn, Steve R. Substrate heater for thin film deposition. United States: N. p., 1996. Web.
Foltyn, Steve R. Substrate heater for thin film deposition. United States.
Foltyn, Steve R. Mon . "Substrate heater for thin film deposition". United States. https://www.osti.gov/servlets/purl/870596.
@article{osti_870596,
title = {Substrate heater for thin film deposition},
author = {Foltyn, Steve R},
abstractNote = {A substrate heater for thin film deposition of metallic oxides upon a target substrate configured as a disk including means for supporting in a predetermined location a target substrate configured as a disk, means for rotating the target substrate within the support means, means for heating the target substrate within the support means, the heating means about the support means and including a pair of heating elements with one heater element situated on each side of the predetermined location for the target substrate, with one heater element defining an opening through which desired coating material can enter for thin film deposition and with the heating means including an opening slot through which the target substrate can be entered into the support means, and, optionally a means for thermal shielding of the heating means from surrounding environment is disclosed.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1996},
month = {1}
}

Works referenced in this record:

Large-area YBCO films for microwave applications
journal, March 1991


Large‐area, two‐sided superconducting YBa 2 Cu 3 O 7− x films deposited by pulsed laser deposition
journal, September 1991


Off‐axis laser deposition of YBa 2 Cu 3 O 7−δ thin films
journal, December 1992


A versatile substrate heater for use in highly oxidizing atmospheres
journal, February 1991


Double gun off-axis sputtering of large area YBa/sub 2/Cu/sub 3/O/sub 7- delta / superconducting films for microwave applications
journal, March 1991


Deposition of high quality YBa 2 Cu 3 O 7−δ thin films over large areas by pulsed laser ablation with substrate scanning
journal, May 1991


Pulsed-laser deposition of oxides over large areas
conference, March 1991