Global to push GA events into
skip to main content

Title: High resolution EUV monochromator/spectrometer

This invention is related to a monochromator which employs a spherical mirror, a traveling plane mirror with simultaneous rotation, and a varied spacing plane grating. The divergent beam from the entrance slit is converged by the spherical mirror located at the various positions in the monochromator depending of the inventive system. To provide the meaningful diffraction efficiencies and to reduce unwanted higher order lights, the deviation angle subtending the incidence and diffraction beams for the plane grating is varied with the position of the traveling plane mirror with simultaneous rotation located in the front or back of the plane grating with wavelength scanning. The outgoing beam from the monochromator goes through the fixed exit slit and has same beam direction regardless of the scanning wavelength. The combination of properly designed motions of the plane mirror and novel varied-spacing parameters of the inventive plane grating corrects the aberrations and focuses the monochromatic spectral image on the exit slit, enabling measurements at high spectral resolution.
Inventors:
 [1]
  1. (Moraga, CA)
Issue Date:
OSTI Identifier:
870481
Assignee:
Regents, University of California (Oakland, CA) LBNL
Patent Number(s):
US 5528364
Contract Number:
AC03-76SF00098
Research Org:
Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA
Country of Publication:
United States
Language:
English
Subject:
resolution; euv; monochromator; spectrometer; related; employs; spherical; mirror; traveling; plane; simultaneous; rotation; varied; spacing; grating; divergent; beam; entrance; slit; converged; located; various; positions; depending; inventive; provide; meaningful; diffraction; efficiencies; reduce; unwanted; lights; deviation; angle; subtending; incidence; beams; position; front; wavelength; scanning; outgoing; fixed; exit; direction; regardless; combination; properly; designed; motions; novel; varied-spacing; parameters; corrects; aberrations; focuses; monochromatic; spectral; image; enabling; measurements; plane grating; plane mirror; beam direction; spherical mirror; spectral image; various positions; mirror located; entrance slit; outgoing beam; /356/250/359/378/