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Title: Condenser for illuminating a ringfield camera with synchrotron emission light

The present invention relates generally to the field of condensers for collecting light from a synchrotron radiation source and directing the light into a ringfield of a lithography camera. The present invention discloses a condenser comprising collecting, processing, and imaging optics. The collecting optics are comprised of concave and convex spherical mirrors that collect the light beams. The processing optics, which receive the light beams, are comprised of flat mirrors that converge and direct the light beams into a real entrance pupil of the camera in a symmetrical pattern. In the real entrance pupil are located flat mirrors, common to the beams emitted from the preceding mirrors, for generating substantially parallel light beams and for directing the beams toward the ringfield of a camera. Finally, the imaging optics are comprised of a spherical mirror, also common to the beams emitted from the preceding mirrors, images the real entrance pupil through the resistive mask and into the virtual entrance pupil of the camera. Thus, the condenser is comprised of a plurality of beams with four mirrors corresponding to a single beam plus two common mirrors.
  1. (13027 Arroyo de Vista, Albuquerque, NM 87111)
Issue Date:
OSTI Identifier:
Sweatt, William C. (13027 Arroyo de Vista, Albuquerque, NM 87111) SNL
Patent Number(s):
US 5512759
Contract Number:
Research Org:
Country of Publication:
United States
condenser; illuminating; ringfield; camera; synchrotron; emission; light; relates; field; condensers; collecting; radiation; source; directing; lithography; discloses; comprising; processing; imaging; optics; comprised; concave; convex; spherical; mirrors; collect; beams; receive; flat; converge; direct; entrance; pupil; symmetrical; pattern; located; common; emitted; preceding; generating; substantially; parallel; finally; mirror; images; resistive; mask; virtual; plurality; corresponding; single; beam; plus; parallel light; flat mirror; imaging optics; entrance pupil; light beam; light beams; radiation source; substantially parallel; spherical mirror; synchrotron radiation; single beam; spherical mirrors; ringfield camera; symmetrical pattern; flat mirrors; emission light; convex spherical; lithography camera; /250/378/