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Title: Cooled window for X-rays or charged particles

A window that provides good structural integrity and a very high capacity for removal of the heat deposited by x-rays, electrons, or ions, with minimum attenuation of the desired beam. The window is cooled by providing microchannels therein through which a coolant is pumped. For example, the window may be made of silicon with etched microchannels therein and covered by a silicon member. A window made of silicon with a total thickness of 520 .mu.m transmits 96% of the x-rays at an energy of 60 keV, and the transmission is higher than 90% for higher energy photons.
Inventors:
 [1]
  1. (Pleasanton, CA)
Issue Date:
OSTI Identifier:
870380
Assignee:
Regents of University of California (Oakland, CA) LLNL
Patent Number(s):
US 5509046
Contract Number:
W-7405-ENG-48
Research Org:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Country of Publication:
United States
Language:
English
Subject:
cooled; window; x-rays; charged; particles; provides; structural; integrity; capacity; removal; heat; deposited; electrons; minimum; attenuation; desired; beam; providing; microchannels; therein; coolant; pumped; example; silicon; etched; covered; total; thickness; 520; transmits; 96; energy; 60; kev; transmission; 90; photons; channels therein; charged particles; charged particle; structural integrity; desired beam; energy photon; energy photons; total thickness; /378/250/