Cooled window for X-rays or charged particles
Abstract
A window that provides good structural integrity and a very high capacity for removal of the heat deposited by x-rays, electrons, or ions, with minimum attenuation of the desired beam. The window is cooled by providing microchannels therein through which a coolant is pumped. For example, the window may be made of silicon with etched microchannels therein and covered by a silicon member. A window made of silicon with a total thickness of 520 .mu.m transmits 96% of the x-rays at an energy of 60 keV, and the transmission is higher than 90% for higher energy photons.
- Inventors:
-
- Pleasanton, CA
- Issue Date:
- Research Org.:
- Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
- OSTI Identifier:
- 870380
- Patent Number(s):
- 5509046
- Assignee:
- Regents of University of California (Oakland, CA)
- Patent Classifications (CPCs):
-
F - MECHANICAL ENGINEERING F27 - FURNACES F27D - DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- DOE Contract Number:
- W-7405-ENG-48
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- cooled; window; x-rays; charged; particles; provides; structural; integrity; capacity; removal; heat; deposited; electrons; minimum; attenuation; desired; beam; providing; microchannels; therein; coolant; pumped; example; silicon; etched; covered; total; thickness; 520; transmits; 96; energy; 60; kev; transmission; 90; photons; channels therein; charged particles; charged particle; structural integrity; desired beam; energy photon; energy photons; total thickness; /378/250/
Citation Formats
Logan, Clinton M. Cooled window for X-rays or charged particles. United States: N. p., 1996.
Web.
Logan, Clinton M. Cooled window for X-rays or charged particles. United States.
Logan, Clinton M. Mon .
"Cooled window for X-rays or charged particles". United States. https://www.osti.gov/servlets/purl/870380.
@article{osti_870380,
title = {Cooled window for X-rays or charged particles},
author = {Logan, Clinton M},
abstractNote = {A window that provides good structural integrity and a very high capacity for removal of the heat deposited by x-rays, electrons, or ions, with minimum attenuation of the desired beam. The window is cooled by providing microchannels therein through which a coolant is pumped. For example, the window may be made of silicon with etched microchannels therein and covered by a silicon member. A window made of silicon with a total thickness of 520 .mu.m transmits 96% of the x-rays at an energy of 60 keV, and the transmission is higher than 90% for higher energy photons.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1996},
month = {1}
}
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