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Title: Reactive multilayer synthesis of hard ceramic foils and films

A method for synthesizing hard ceramic materials such as carbides, borides nd aluminides, particularly in the form of coatings provided on another material so as to improve the wear and abrasion performance of machine tools, for example. The method involves the sputter deposition of alternating layers of reactive metals with layers of carbon, boron, or aluminum and the subsequent reaction of the multilayered structure to produce a dense crystalline ceramic. The material can be coated on a substrate or formed as a foil which can be coild as a tape for later use.
 [1];  [2]
  1. (Livermore, CA)
  2. (San Jose, CA)
Issue Date:
OSTI Identifier:
United States of America as represented by Department of Energy (Washington, DC) LLNL
Patent Number(s):
US 5490911
Contract Number:
Research Org:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Country of Publication:
United States
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