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Title: Surface treatment of magnetic recording heads

Surface modification of magnetic recording heads using plasma immersion ion implantation and deposition is disclosed. This method may be carried out using a vacuum arc deposition system with a metallic or carbon cathode. By operating a plasma gun in a long-pulse mode and biasing the substrate holder with short pulses of a high negative voltage, direct ion implantation, recoil implantation, and surface deposition are combined to modify the near-surface regions of the head or substrate in processing times which may be less than 5 min. The modified regions are atomically mixed into the substrate. This surface modification improves the surface smoothness and hardness and enhances the tribological characteristics under conditions of contact-start-stop and continuous sliding. These results are obtained while maintaining original tolerances.
Inventors:
 [1];  [2];  [3];  [3];  [3];  [4]
  1. (Orinda, CA)
  2. (Berkeley, CA)
  3. (Albany, CA)
  4. (Morgan Hill, CA)
Issue Date:
OSTI Identifier:
870209
Assignee:
International Business Machines, Inc. (New York, NY); Regents of University of California (Oakland, CA) LBNL
Patent Number(s):
US 5476691
Contract Number:
AC03-76SF00098
Research Org:
Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA
Country of Publication:
United States
Language:
English
Subject:
surface; treatment; magnetic; recording; heads; modification; plasma; immersion; implantation; deposition; disclosed; method; carried; vacuum; metallic; carbon; cathode; operating; gun; long-pulse; mode; biasing; substrate; holder; pulses; negative; voltage; direct; recoil; combined; modify; near-surface; regions; head; processing; times; modified; atomically; mixed; improves; smoothness; hardness; enhances; tribological; characteristics; conditions; contact-start-stop; continuous; sliding; results; obtained; maintaining; original; tolerances; negative voltage; processing time; substrate holder; surface modification; surface region; magnetic recording; plasma gun; near-surface regions; surface treatment; surface smoothness; surface deposition; surface deposit; near-surface region; recording heads; pulse mode; surface regions; plasma immersion; /427/