Fabrication of amorphous diamond films

Falabella, Steven

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Title: Fabrication of amorphous diamond films

Abstract

Amorphous diamond films having a significant reduction in intrinsic stress are prepared by biasing a substrate to be coated and depositing carbon ions thereon under controlled temperature conditions.

Inventors:

Falabella, Steven ^[1]

Livermore, CA

Issue Date:: 1995-01-01

Research Org.:: Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)

OSTI Identifier:: 870201

Patent Number(s):: 5474816

Assignee:: Regents of University of California (Oakland, CA)

Patent Classifications (CPCs):: C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION

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C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
C23C14/0605 - {Carbon}
C23C14/541 - {Heating or cooling of the substrates}

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
Y10T428/265 - 1 mil or less
Y10T428/30 - Self-sustaining carbon mass or layer with impregnant or other layer
Y10T428/31507 - Of polycarbonate
Y10T428/31678 - Of metal

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DOE Contract Number:: W-7405-ENG-48

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Subject:: fabrication; amorphous; diamond; films; significant; reduction; intrinsic; stress; prepared; biasing; substrate; coated; depositing; carbon; thereon; controlled; temperature; conditions; amorphous diamond; temperature conditions; controlled temperature; significant reduction; diamond film; diamond films; depositing carbon; intrinsic stress; /427/423/

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                    Falabella, Steven. Fabrication of amorphous diamond films.  United States: N. p., 1995. 
        Web.

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                    Falabella, Steven. Fabrication of amorphous diamond films.  United States.

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                    Falabella, Steven. Sun .  
        "Fabrication of amorphous diamond films".  United States.  https://www.osti.gov/servlets/purl/870201.

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@article{osti_870201,

  title        = {Fabrication of amorphous diamond films},

  author       = {Falabella, Steven},

  abstractNote = {Amorphous diamond films having a significant reduction in intrinsic stress are prepared by biasing a substrate to be coated and depositing carbon ions thereon under controlled temperature conditions.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {1995},

  month        = {1}

}

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Works referenced in this record:

Diamond and diamond-like phases
journal, August 1991

Angus, J. C.
Diamond and Related Materials, Vol. 1, Issue 1
https://doi.org/10.1016/0925-9635(91)90012-Y

Internal stress reduction by nitrogen incorporation in hard amorphous carbon thin films
journal, June 1992

Franceschini, D. F.; Achete, C. A.; Freire, F. L.
Applied Physics Letters, Vol. 60, Issue 26
https://doi.org/10.1063/1.106702

Structure and bonding studies of the C:N thin films produced by rf sputtering method
journal, November 1990

Torng, C. J.; Sivertsen, J. M.; Judy, J. H.
Journal of Materials Research, Vol. 5, Issue 11
https://doi.org/10.1557/JMR.1990.2490

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Title: Fabrication of amorphous diamond films

Abstract

Citation Formats

Diamond and diamond-like phases journal, August 1991

Internal stress reduction by nitrogen incorporation in hard amorphous carbon thin films journal, June 1992

Structure and bonding studies of the C:N thin films produced by rf sputtering method journal, November 1990

Diamond and diamond-like phases
journal, August 1991

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journal, June 1992

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journal, November 1990