Magnetic-cusp, cathodic-arc source

Falabella, Steven

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Title: Magnetic-cusp, cathodic-arc source

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Abstract

A magnetic-cusp for a cathodic-arc source wherein the arc is confined to the desired cathode surface, provides a current path for electrons from the cathode to the anode, and utilizes electric and magnetic fields to guide ions from the cathode to a point of use, such as substrates to be coated. The magnetic-cusp insures arc stability by an easy magnetic path from anode to cathode, while the straight-through arrangement leads to high ion transmission.

Inventors:

Falabella, Steven ^[1]

Livermore, CA

Issue Date:: 1995-01-01

Research Org.:: Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)

OSTI Identifier:: 870162

Patent Number(s):: 5468363

Assignee:: Regents of University of California (Oakland, CA)

Patent Classifications (CPCs):: H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS

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H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/022 - Avoiding or removing foreign or contaminating particles, debris or deposits on sample or tube
H01J2237/3142 - Ion plating
H01J27/14 - Other arc discharge ion sources using an applied magnetic field
H01J37/05 - Electron or ion-optical arrangements for separating electrons or ions according to their energy {or mass}

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DOE Contract Number:: W-7405-ENG-48

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Subject:: magnetic-cusp; cathodic-arc; source; confined; desired; cathode; surface; provides; current; path; electrons; anode; utilizes; electric; magnetic; fields; guide; substrates; coated; insures; stability; easy; straight-through; arrangement; leads; transmission; magnetic field; magnetic fields; cathode surface; current path; cathodic-arc source; utilizes electric; magnetic path; /204/250/313/315/

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                    Falabella, Steven. Magnetic-cusp, cathodic-arc source.  United States: N. p., 1995. 
        Web.

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                    Falabella, Steven. Magnetic-cusp, cathodic-arc source.  United States.

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                    Falabella, Steven. Sun .  
        "Magnetic-cusp, cathodic-arc source".  United States.  https://www.osti.gov/servlets/purl/870162.

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@article{osti_870162,

  title        = {Magnetic-cusp, cathodic-arc source},

  author       = {Falabella, Steven},

  abstractNote = {A magnetic-cusp for a cathodic-arc source wherein the arc is confined to the desired cathode surface, provides a current path for electrons from the cathode to the anode, and utilizes electric and magnetic fields to guide ions from the cathode to a point of use, such as substrates to be coated. The magnetic-cusp insures arc stability by an easy magnetic path from anode to cathode, while the straight-through arrangement leads to high ion transmission.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {1995},

  month        = {1}

}

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