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Title: Magnetic force microscopy method and apparatus to detect and image currents in integrated circuits

Abstract

A magnetic force microscopy method and improved magnetic tip for detecting and quantifying internal magnetic fields resulting from current of integrated circuits. Detection of the current is used for failure analysis, design verification, and model validation. The interaction of the current on the integrated chip with a magnetic field can be detected using a cantilevered magnetic tip. Enhanced sensitivity for both ac and dc current and voltage detection is achieved with voltage by an ac coupling or a heterodyne technique. The techniques can be used to extract information from analog circuits.

Inventors:
 [1];  [2];  [3]
  1. 13170-B Central SE #188, Albuquerque, NM 87123
  2. 2800 Tennessee NE, Albuquerque, NM 87110
  3. (2116 White Cloud NE, Albuquerque, NM 87112)
Issue Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States); American Telephone and Telegraph Company
Sponsoring Org.:
USDOE
OSTI Identifier:
870148
Patent Number(s):
5465046
Assignee:
Campbell, Ann. N. (13170-B Central SE #188, Albuquerque, NM 87123);Anderson, Richard E. (2800 Tennessee NE, Albuquerque, NM 87110);Cole, Jr., Edward I. (2116 White Cloud NE, Albuquerque, NM 87112)
Patent Classifications (CPCs):
G - PHYSICS G01 - MEASURING G01R - MEASURING ELECTRIC VARIABLES
G - PHYSICS G01 - MEASURING G01Q - SCANNING-PROBE TECHNIQUES OR APPARATUS
DOE Contract Number:  
AC04-76DP00789; AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
magnetic; force; microscopy; method; apparatus; detect; image; currents; integrated; circuits; improved; tip; detecting; quantifying; internal; fields; resulting; current; detection; failure; analysis; design; verification; model; validation; interaction; chip; field; detected; cantilevered; enhanced; sensitivity; dc; voltage; achieved; coupling; heterodyne; technique; techniques; extract; information; analog; enhanced sensitivity; magnetic force; magnetic field; magnetic fields; integrated circuits; integrated circuit; failure analysis; dc current; analog circuit; microscopy method; force microscopy; heterodyne technique; improved magnetic; image currents; /324/

Citation Formats

Campbell, Ann N, Anderson, Richard E, and Cole, Jr., Edward I.. Magnetic force microscopy method and apparatus to detect and image currents in integrated circuits. United States: N. p., 1995. Web.
Campbell, Ann N, Anderson, Richard E, & Cole, Jr., Edward I.. Magnetic force microscopy method and apparatus to detect and image currents in integrated circuits. United States.
Campbell, Ann N, Anderson, Richard E, and Cole, Jr., Edward I.. Sun . "Magnetic force microscopy method and apparatus to detect and image currents in integrated circuits". United States. https://www.osti.gov/servlets/purl/870148.
@article{osti_870148,
title = {Magnetic force microscopy method and apparatus to detect and image currents in integrated circuits},
author = {Campbell, Ann N and Anderson, Richard E and Cole, Jr., Edward I.},
abstractNote = {A magnetic force microscopy method and improved magnetic tip for detecting and quantifying internal magnetic fields resulting from current of integrated circuits. Detection of the current is used for failure analysis, design verification, and model validation. The interaction of the current on the integrated chip with a magnetic field can be detected using a cantilevered magnetic tip. Enhanced sensitivity for both ac and dc current and voltage detection is achieved with voltage by an ac coupling or a heterodyne technique. The techniques can be used to extract information from analog circuits.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1995},
month = {1}
}

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Works referenced in this record:

Batch fabricated sensors for magnetic force microscopy
journal, October 1990


Probe calibration in magnetic force microscopy
journal, December 1990


Magnetic force microscopy/current contrast imaging: A new technique for internal current probing of ICs
journal, March 1994


Voltage-contrast scanning probe microscopy
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Force microscopy of magnetization patterns in longitudinal recording media
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An Approach to Chip-Internal Current Monitoring and Measurement Using an Electron beam Tester
conference, January 1991


Magnetic imaging by ‘‘force microscopy’’ with 1000 Å resolution
journal, May 1987


Internal current probing of integrated circuits using magnetic force microscopy
conference, January 1993


Magnetic force microscopy with 25 nm resolution
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Frequency modulation detection using high‐ Q cantilevers for enhanced force microscope sensitivity
journal, January 1991


High‐resolution magnetic imaging of domains in TbFe by force microscopy
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Magnetic force microscopy with batch‐fabricated force sensors
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