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Title: Magnetic force microscopy method and apparatus to detect and image currents in integrated circuits

Abstract

A magnetic force microscopy method and improved magnetic tip for detecting and quantifying internal magnetic fields resulting from current of integrated circuits. Detection of the current is used for failure analysis, design verification, and model validation. The interaction of the current on the integrated chip with a magnetic field can be detected using a cantilevered magnetic tip. Enhanced sensitivity for both ac and dc current and voltage detection is achieved with voltage by an ac coupling or a heterodyne technique. The techniques can be used to extract information from analog circuits.

Inventors:
 [1];  [2];  [3]
  1. (13170-B Central SE #188, Albuquerque, NM 87123)
  2. (2800 Tennessee NE, Albuquerque, NM 87110)
  3. (2116 White Cloud NE, Albuquerque, NM 87112)
Issue Date:
Research Org.:
Sandia National Laboratories (SNL-NM), Albuquerque, NM; American Telephone and Telegraph Company
Sponsoring Org.:
USDOE
OSTI Identifier:
870148
Patent Number(s):
5465046
Assignee:
Campbell, Ann. N. (13170-B Central SE #188, Albuquerque, NM 87123);Anderson, Richard E. (2800 Tennessee NE, Albuquerque, NM 87110);Cole, Jr., Edward I. (2116 White Cloud NE, Albuquerque, NM 87112) SNL
DOE Contract Number:  
AC04-76DP00789; AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
magnetic; force; microscopy; method; apparatus; detect; image; currents; integrated; circuits; improved; tip; detecting; quantifying; internal; fields; resulting; current; detection; failure; analysis; design; verification; model; validation; interaction; chip; field; detected; cantilevered; enhanced; sensitivity; dc; voltage; achieved; coupling; heterodyne; technique; techniques; extract; information; analog; enhanced sensitivity; magnetic force; magnetic field; magnetic fields; integrated circuits; integrated circuit; failure analysis; dc current; analog circuit; microscopy method; force microscopy; heterodyne technique; improved magnetic; image currents; /324/

Citation Formats

Campbell, Ann. N., Anderson, Richard E., and Cole, Jr., Edward I. Magnetic force microscopy method and apparatus to detect and image currents in integrated circuits. United States: N. p., 1995. Web.
Campbell, Ann. N., Anderson, Richard E., & Cole, Jr., Edward I. Magnetic force microscopy method and apparatus to detect and image currents in integrated circuits. United States.
Campbell, Ann. N., Anderson, Richard E., and Cole, Jr., Edward I. Sun . "Magnetic force microscopy method and apparatus to detect and image currents in integrated circuits". United States. https://www.osti.gov/servlets/purl/870148.
@article{osti_870148,
title = {Magnetic force microscopy method and apparatus to detect and image currents in integrated circuits},
author = {Campbell, Ann. N. and Anderson, Richard E. and Cole, Jr., Edward I.},
abstractNote = {A magnetic force microscopy method and improved magnetic tip for detecting and quantifying internal magnetic fields resulting from current of integrated circuits. Detection of the current is used for failure analysis, design verification, and model validation. The interaction of the current on the integrated chip with a magnetic field can be detected using a cantilevered magnetic tip. Enhanced sensitivity for both ac and dc current and voltage detection is achieved with voltage by an ac coupling or a heterodyne technique. The techniques can be used to extract information from analog circuits.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1995},
month = {1}
}

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