Maskless laser writing of microscopic metallic interconnects
Abstract
A method of forming a metal pattern on a substrate. The method includes depositing an insulative nitride film on a substrate and irradiating a laser beam onto the nitride film, thus decomposing the metal nitride into a metal constituent and a gaseous constituent, the metal constituent remaining in the nitride film as a conductive pattern.
- Inventors:
-
- Oak Ridge, TN
- Issue Date:
- Research Org.:
- Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
- OSTI Identifier:
- 870119
- Patent Number(s):
- 5459098
- Assignee:
- Marietta Energy Systems, Inc. (Oak Ridge, TN)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
- DOE Contract Number:
- AC05-84OR21400
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- maskless; laser; writing; microscopic; metallic; interconnects; method; forming; metal; pattern; substrate; depositing; insulative; nitride; film; irradiating; beam; decomposing; constituent; gaseous; remaining; conductive; nitride film; laser beam; metal nitride; metal constituent; laser writing; /427/438/
Citation Formats
Maya, Leon. Maskless laser writing of microscopic metallic interconnects. United States: N. p., 1995.
Web.
Maya, Leon. Maskless laser writing of microscopic metallic interconnects. United States.
Maya, Leon. Sun .
"Maskless laser writing of microscopic metallic interconnects". United States. https://www.osti.gov/servlets/purl/870119.
@article{osti_870119,
title = {Maskless laser writing of microscopic metallic interconnects},
author = {Maya, Leon},
abstractNote = {A method of forming a metal pattern on a substrate. The method includes depositing an insulative nitride film on a substrate and irradiating a laser beam onto the nitride film, thus decomposing the metal nitride into a metal constituent and a gaseous constituent, the metal constituent remaining in the nitride film as a conductive pattern.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Sun Jan 01 00:00:00 EST 1995},
month = {Sun Jan 01 00:00:00 EST 1995}
}