Maskless laser writing of microscopic metallic interconnects

Maya, Leon

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Title: Maskless laser writing of microscopic metallic interconnects

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Abstract

A method of forming a metal pattern on a substrate. The method includes depositing an insulative nitride film on a substrate and irradiating a laser beam onto the nitride film, thus decomposing the metal nitride into a metal constituent and a gaseous constituent, the metal constituent remaining in the nitride film as a conductive pattern.

Inventors:

Maya, Leon ^[1]

Oak Ridge, TN

Issue Date:: Sun Jan 01 00:00:00 EST 1995

Research Org.:: Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)

OSTI Identifier:: 870119

Patent Number(s):: 5459098

Assignee:: Marietta Energy Systems, Inc. (Oak Ridge, TN)

Patent Classifications (CPCs):: H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES

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H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
H01L21/3105 - After-treatment
H01L21/76894 - {using a laser, e.g. laser cutting, laser direct writing, laser repair}

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DOE Contract Number:: AC05-84OR21400

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Subject:: maskless; laser; writing; microscopic; metallic; interconnects; method; forming; metal; pattern; substrate; depositing; insulative; nitride; film; irradiating; beam; decomposing; constituent; gaseous; remaining; conductive; nitride film; laser beam; metal nitride; metal constituent; laser writing; /427/438/

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                    Maya, Leon. Maskless laser writing of microscopic metallic interconnects.  United States: N. p., 1995. 
        Web.

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                    Maya, Leon. Maskless laser writing of microscopic metallic interconnects.  United States.

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                    Maya, Leon. Sun .  
        "Maskless laser writing of microscopic metallic interconnects".  United States.  https://www.osti.gov/servlets/purl/870119.

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@article{osti_870119,

  title        = {Maskless laser writing of microscopic metallic interconnects},

  author       = {Maya, Leon},

  abstractNote = {A method of forming a metal pattern on a substrate. The method includes depositing an insulative nitride film on a substrate and irradiating a laser beam onto the nitride film, thus decomposing the metal nitride into a metal constituent and a gaseous constituent, the metal constituent remaining in the nitride film as a conductive pattern.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {Sun Jan 01 00:00:00 EST 1995},

  month        = {Sun Jan 01 00:00:00 EST 1995}

}

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