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Title: Maskless laser writing of microscopic metallic interconnects

Abstract

A method of forming a metal pattern on a substrate. The method includes depositing an insulative nitride film on a substrate and irradiating a laser beam onto the nitride film, thus decomposing the metal nitride into a metal constituent and a gaseous constituent, the metal constituent remaining in the nitride film as a conductive pattern.

Inventors:
 [1]
  1. (Oak Ridge, TN)
Issue Date:
Research Org.:
LOCKHEED MARTIN ENRGY SYST INC
OSTI Identifier:
870119
Patent Number(s):
5459098
Assignee:
Marietta Energy Systems, Inc. (Oak Ridge, TN) ORNL
DOE Contract Number:  
AC05-84OR21400
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
maskless; laser; writing; microscopic; metallic; interconnects; method; forming; metal; pattern; substrate; depositing; insulative; nitride; film; irradiating; beam; decomposing; constituent; gaseous; remaining; conductive; nitride film; laser beam; metal nitride; metal constituent; laser writing; /427/438/

Citation Formats

Maya, Leon. Maskless laser writing of microscopic metallic interconnects. United States: N. p., 1995. Web.
Maya, Leon. Maskless laser writing of microscopic metallic interconnects. United States.
Maya, Leon. Sun . "Maskless laser writing of microscopic metallic interconnects". United States. https://www.osti.gov/servlets/purl/870119.
@article{osti_870119,
title = {Maskless laser writing of microscopic metallic interconnects},
author = {Maya, Leon},
abstractNote = {A method of forming a metal pattern on a substrate. The method includes depositing an insulative nitride film on a substrate and irradiating a laser beam onto the nitride film, thus decomposing the metal nitride into a metal constituent and a gaseous constituent, the metal constituent remaining in the nitride film as a conductive pattern.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1995},
month = {1}
}

Patent:

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