Global to push GA events into
skip to main content

Title: System for monitoring the growth of crystalline films on stationary substrates

A system for monitoring the growth of crystalline films on stationary or rotating substrates includes a combination of some or all of the elements including a photodiode sensor for detecting the intensity of incoming light and converting it to a measurable current, a lens for focusing the RHEED pattern emanating from the phosphor screen onto the photodiode, an interference filter for filtering out light other than that which emanates from the phosphor screen, a current amplifier for amplifying and converting the current produced by the photodiode into a voltage, a computer for receiving the amplified photodiode current for RHEED data analysis, and a graphite impregnated triax cable for improving the signal to noise ratio obtained while sampling a stationary or rotating substrate. A rotating stage for supporting the substrate with diametrically positioned electron beam apertures and an optically encoded shaft can also be used to accommodate rotation of the substrate during measurement.
  1. (Lakewood, CO)
Issue Date:
OSTI Identifier:
Midwest Research Institute (Kansas City, MO) CHO
Patent Number(s):
US 5456205
Contract Number:
Research Org:
Sponsoring Org:
Country of Publication:
United States
monitoring; growth; crystalline; films; stationary; substrates; rotating; combination; elements; including; photodiode; sensor; detecting; intensity; incoming; light; converting; measurable; current; lens; focusing; rheed; pattern; emanating; phosphor; screen; interference; filter; filtering; emanates; amplifier; amplifying; produced; voltage; computer; receiving; amplified; data; analysis; graphite; impregnated; triax; cable; improving; signal; noise; ratio; obtained; sampling; substrate; stage; supporting; diametrically; positioned; electron; beam; apertures; optically; encoded; shaft; accommodate; rotation; measurement; rotating substrate; phosphor screen; current produced; data analysis; crystalline films; incoming light; interference filter; electron beam; elements including; noise ratio; current amplifier; rotating substrates; stationary substrates; photodiode sensor; /117/