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Title: Microbar sensor

Abstract

A mass microsensor is fabricated with a microcantilever oscillated by a piezoelectric transducer. A chemical coating having absorptive or adsorptive affinity for a specifically targeted chemical or compound is applied to the microcantilever for oscillation in the monitored atmosphere. Molecules of the targeted chemical attach to the microcantilever coating resulting in an oscillating mass increase which influences the resonant frequency of the microcantilever oscillation. The rate at which the coated microcantilever accumulates the target chemical is functional of the target chemical concentration. Consequently, the extent of microcantilever oscillation frequency change is related to the concentration of the target chemical within the monitored atmosphere. Such oscillation frequency changes are detected by a center-crossing photodiode which responds to a laser diode beam reflected from the microcantilever surface resulting in an output frequency from the photodiode that is synchronous with the microcantilever frequency.

Inventors:
 [1];  [2]
  1. (Oak Ridge, TN)
  2. (Knoxville, TN)
Issue Date:
Research Org.:
LOCKHEED MARTIN ENRGY SYST INC
OSTI Identifier:
870044
Patent Number(s):
5445008
Assignee:
Martin Marietta Energy Systems, Inc. (Oak Ridge, TN) ORNL
DOE Contract Number:  
AC05-84OR21400
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
microbar; sensor; mass; microsensor; fabricated; microcantilever; oscillated; piezoelectric; transducer; chemical; coating; absorptive; adsorptive; affinity; specifically; targeted; compound; applied; oscillation; monitored; atmosphere; molecules; attach; resulting; oscillating; increase; influences; resonant; frequency; rate; coated; accumulates; target; functional; concentration; consequently; extent; change; related; changes; detected; center-crossing; photodiode; responds; laser; diode; beam; reflected; surface; output; synchronous; chemical coating; output frequency; oscillation frequency; beam reflected; resonant frequency; laser diode; piezoelectric transducer; target chemical; chemical concentration; targeted chemical; frequency change; chemical attach; coated microcantilever; /73/422/

Citation Formats

Wachter, Eric A., and Thundat, Thomas G. Microbar sensor. United States: N. p., 1995. Web.
Wachter, Eric A., & Thundat, Thomas G. Microbar sensor. United States.
Wachter, Eric A., and Thundat, Thomas G. Sun . "Microbar sensor". United States. https://www.osti.gov/servlets/purl/870044.
@article{osti_870044,
title = {Microbar sensor},
author = {Wachter, Eric A. and Thundat, Thomas G.},
abstractNote = {A mass microsensor is fabricated with a microcantilever oscillated by a piezoelectric transducer. A chemical coating having absorptive or adsorptive affinity for a specifically targeted chemical or compound is applied to the microcantilever for oscillation in the monitored atmosphere. Molecules of the targeted chemical attach to the microcantilever coating resulting in an oscillating mass increase which influences the resonant frequency of the microcantilever oscillation. The rate at which the coated microcantilever accumulates the target chemical is functional of the target chemical concentration. Consequently, the extent of microcantilever oscillation frequency change is related to the concentration of the target chemical within the monitored atmosphere. Such oscillation frequency changes are detected by a center-crossing photodiode which responds to a laser diode beam reflected from the microcantilever surface resulting in an output frequency from the photodiode that is synchronous with the microcantilever frequency.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1995},
month = {1}
}

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