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Title: Surface property detection apparatus and method

Abstract

Apparatus and method for detecting, determining, and imaging surface resistance corrosion, thin film growth, and oxide formation on the surface of conductors or other electrical surface modification. The invention comprises a modified confocal resonator structure with the sample remote from the radiating mirror. Surface resistance is determined by analyzing and imaging reflected microwaves; imaging reveals anomalies due to surface impurities, non-stoichiometry, and the like, in the surface of the superconductor, conductor, dielectric, or semiconductor.

Inventors:
 [1];  [2];  [3];  [1]
  1. Albuquerque, NM
  2. Evergreen, CO
  3. Placitas, NM
Issue Date:
Research Org.:
AT&T
OSTI Identifier:
870017
Patent Number(s):
5440238
Assignee:
Sandia Corporation (Albuquerque, NM)
Patent Classifications (CPCs):
G - PHYSICS G01 - MEASURING G01R - MEASURING ELECTRIC VARIABLES
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
DOE Contract Number:  
AC04-76DP00789
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
surface; property; detection; apparatus; method; detecting; determining; imaging; resistance; corrosion; film; growth; oxide; formation; conductors; electrical; modification; comprises; modified; confocal; resonator; structure; sample; remote; radiating; mirror; determined; analyzing; reflected; microwaves; reveals; anomalies; due; impurities; non-stoichiometry; superconductor; conductor; dielectric; semiconductor; surface resistance; detection apparatus; film growth; surface modification; resonator structure; surface impurities; imaging surface; sample remote; oxide form; reflected microwave; confocal resonator; /324/117/118/

Citation Formats

Martens, Jon S, Ginley, David S, Hietala, Vincent M, and Sorensen, Neil R. Surface property detection apparatus and method. United States: N. p., 1995. Web.
Martens, Jon S, Ginley, David S, Hietala, Vincent M, & Sorensen, Neil R. Surface property detection apparatus and method. United States.
Martens, Jon S, Ginley, David S, Hietala, Vincent M, and Sorensen, Neil R. Sun . "Surface property detection apparatus and method". United States. https://www.osti.gov/servlets/purl/870017.
@article{osti_870017,
title = {Surface property detection apparatus and method},
author = {Martens, Jon S and Ginley, David S and Hietala, Vincent M and Sorensen, Neil R},
abstractNote = {Apparatus and method for detecting, determining, and imaging surface resistance corrosion, thin film growth, and oxide formation on the surface of conductors or other electrical surface modification. The invention comprises a modified confocal resonator structure with the sample remote from the radiating mirror. Surface resistance is determined by analyzing and imaging reflected microwaves; imaging reveals anomalies due to surface impurities, non-stoichiometry, and the like, in the surface of the superconductor, conductor, dielectric, or semiconductor.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Sun Jan 01 00:00:00 EST 1995},
month = {Sun Jan 01 00:00:00 EST 1995}
}

Works referenced in this record:

Morphology control and high critical currents in superconducting thin films in the Tl-Ca-Ba-Cu-O system
journal, August 1989


The effects of processing sequences on the microwave surface resistance of TlCaBaCuO
journal, June 1991


Infrared and Optical Masers
journal, December 1958


Hydrogen plasma treatment of silicon surfaces studied by in-situ spectroscopic ellipsometry
journal, December 1990


Confocal resonators for measuring the surface resistance of high‐temperature superconducting films
journal, June 1991


Microwave surface resistance of YBa 2 Cu 3 O 6.9 superconducting films
journal, May 1988


The role of low temperatures in the operation of logic circuitry
journal, January 1970


On the Focused Fabry-Perot Resonator in Plasma Diagnostics (Correspondence)
journal, September 1964