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Title: Controlled removal of ceramic surfaces with combination of ions implantation and ultrasonic energy

Abstract

A method for tailoring or patterning the surface of ceramic articles is provided by implanting ions to predetermined depth into the ceramic material at a selected surface location with the ions being implanted at a fluence and energy adequate to damage the lattice structure of the ceramic material for bi-axially straining near-surface regions of the ceramic material to the predetermined depth. The resulting metastable near-surface regions of the ceramic material are then contacted with energy pulses from collapsing, ultrasonically-generated cavitation bubbles in a liquid medium for removing to a selected depth the ion-damaged near-surface regions containing the bi-axially strained lattice structure from the ceramic body. Additional patterning of the selected surface location on the ceramic body is provided by implanting a high fluence of high-energy, relatively-light ions at selected surface sites for relaxing the bi-axial strain in the near-surface regions defined by these sites and thereby preventing the removal of such ion-implanted sites by the energy pulses from the collapsing ultrasonic cavitation bubbles.

Inventors:
 [1];  [2];  [3];  [4]
  1. (Oak Ridge, TN)
  2. (Providence, RI)
  3. (Caluire, FR)
  4. (Gaudeloupe Antilles, FR)
Issue Date:
Research Org.:
LOCKHEED MARTIN ENRGY SYST INC
OSTI Identifier:
870008
Patent Number(s):
5437729
Assignee:
Martin Marietta Energy Systems, Inc. (Oak Ridge, TN) ORNL
DOE Contract Number:  
AC05-84OR21400
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
controlled; removal; ceramic; surfaces; combination; implantation; ultrasonic; energy; method; tailoring; patterning; surface; articles; provided; implanting; predetermined; depth; material; selected; location; implanted; fluence; adequate; damage; lattice; structure; bi-axially; straining; near-surface; regions; resulting; metastable; contacted; pulses; collapsing; ultrasonically-generated; cavitation; bubbles; liquid; medium; removing; ion-damaged; containing; strained; additional; high-energy; relatively-light; sites; relaxing; bi-axial; strain; defined; preventing; ion-implanted; selected surface; regions containing; surface region; ceramic article; ultrasonic energy; ceramic material; near-surface regions; ceramic articles; lattice structure; liquid medium; ultrasonic cavitation; surface location; predetermined depth; near-surface region; energy pulse; energy pulses; ceramic surface; ceramic surfaces; surface regions; ceramic mater; /134/216/427/

Citation Formats

Boatner, Lynn A., Rankin, Janet, Thevenard, Paul, and Romana, Laurence J. Controlled removal of ceramic surfaces with combination of ions implantation and ultrasonic energy. United States: N. p., 1995. Web.
Boatner, Lynn A., Rankin, Janet, Thevenard, Paul, & Romana, Laurence J. Controlled removal of ceramic surfaces with combination of ions implantation and ultrasonic energy. United States.
Boatner, Lynn A., Rankin, Janet, Thevenard, Paul, and Romana, Laurence J. Sun . "Controlled removal of ceramic surfaces with combination of ions implantation and ultrasonic energy". United States. https://www.osti.gov/servlets/purl/870008.
@article{osti_870008,
title = {Controlled removal of ceramic surfaces with combination of ions implantation and ultrasonic energy},
author = {Boatner, Lynn A. and Rankin, Janet and Thevenard, Paul and Romana, Laurence J.},
abstractNote = {A method for tailoring or patterning the surface of ceramic articles is provided by implanting ions to predetermined depth into the ceramic material at a selected surface location with the ions being implanted at a fluence and energy adequate to damage the lattice structure of the ceramic material for bi-axially straining near-surface regions of the ceramic material to the predetermined depth. The resulting metastable near-surface regions of the ceramic material are then contacted with energy pulses from collapsing, ultrasonically-generated cavitation bubbles in a liquid medium for removing to a selected depth the ion-damaged near-surface regions containing the bi-axially strained lattice structure from the ceramic body. Additional patterning of the selected surface location on the ceramic body is provided by implanting a high fluence of high-energy, relatively-light ions at selected surface sites for relaxing the bi-axial strain in the near-surface regions defined by these sites and thereby preventing the removal of such ion-implanted sites by the energy pulses from the collapsing ultrasonic cavitation bubbles.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1995},
month = {1}
}

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