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Title: Dissipation factor as a predictor of anodic coating performance

A dissipation factor measurement is used to predict as-anodized fixture performance prior to actual use of the fixture in an etching environment. A dissipation factor measurement of the anodic coating determines its dielectric characteristics and correlates to the performance of the anodic coating in actual use. The ability to predict the performance of the fixture and its anodized coating permits the fixture to be repaired or replaced prior to complete failure.
Inventors:
 [1]
  1. (Edgewood, NM)
Issue Date:
OSTI Identifier:
869850
Assignee:
Sematech, Inc. (Austin, TX) SNL
Patent Number(s):
US 5410256
Contract Number:
FI04-89AL58872
Research Org:
Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA
Country of Publication:
United States
Language:
English
Subject:
dissipation; factor; predictor; anodic; coating; performance; measurement; predict; as-anodized; fixture; prior; etching; environment; determines; dielectric; characteristics; correlates; ability; anodized; permits; repaired; replaced; complete; failure; anodized coating; dissipation factor; factor measurement; /324/204/205/427/

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