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Title: Apparatus for silicon nitride precursor solids recovery

Method and apparatus are provided for collecting reaction product solids entrained in a gaseous outflow from a reaction situs, wherein the gaseous outflow includes a condensable vapor. A condensate is formed of the condensable vapor on static mixer surfaces within a static mixer heat exchanger. The entrained reaction product solids are captured in the condensate which can be collected for further processing, such as return to the reaction situs. In production of silicon imide, optionally integrated into a production process for making silicon nitride caramic, wherein reactant feed gas comprising silicon halide and substantially inert carrier gas is reacted with liquid ammonia in a reaction vessel, silicon imide reaction product solids entrained in a gaseous outflow comprising residual carrier gas and vaporized ammonia can be captured by forming a condensate of the ammonia vapor on static mixer surfaces of a static mixer heat exchanger.
Inventors:
 [1];  [2];  [3]
  1. (Dearborn, MI)
  2. (Livonia, MI)
  3. (Wayne, MI)
Issue Date:
OSTI Identifier:
869815
Assignee:
Ford Motor Company (Dearborn, MI) ORNL
Patent Number(s):
US 5403563
Application Number:
07/926,257
Contract Number:
86X-22001C
Research Org:
Oak Ridge National Laboratory (ORNL), Oak Ridge, TN
Country of Publication:
United States
Language:
English
Subject:
apparatus; silicon; nitride; precursor; solids; recovery; method; provided; collecting; reaction; product; entrained; gaseous; outflow; situs; condensable; vapor; condensate; formed; static; mixer; surfaces; heat; exchanger; captured; collected; processing; return; production; imide; optionally; integrated; process; caramic; reactant; feed; gas; comprising; halide; substantially; inert; carrier; reacted; liquid; ammonia; vessel; residual; vaporized; forming; recovery method; product solids; substantially inert; inert carrier; gaseous outflow; condensable vapor; solids entrained; reactant feed; static mixer; silicon nitride; carrier gas; heat exchange; heat exchanger; reaction product; reaction vessel; feed gas; gas comprising; comprising silicon; reaction situs; production process; solids recovery; collecting reaction; nitride precursor; entrained reaction; precursor solids; /422/55/261/366/

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