Apparatus for silicon nitride precursor solids recovery
Abstract
Method and apparatus are provided for collecting reaction product solids entrained in a gaseous outflow from a reaction situs, wherein the gaseous outflow includes a condensable vapor. A condensate is formed of the condensable vapor on static mixer surfaces within a static mixer heat exchanger. The entrained reaction product solids are captured in the condensate which can be collected for further processing, such as return to the reaction situs. In production of silicon imide, optionally integrated into a production process for making silicon nitride caramic, wherein reactant feed gas comprising silicon halide and substantially inert carrier gas is reacted with liquid ammonia in a reaction vessel, silicon imide reaction product solids entrained in a gaseous outflow comprising residual carrier gas and vaporized ammonia can be captured by forming a condensate of the ammonia vapor on static mixer surfaces of a static mixer heat exchanger.
- Inventors:
-
- Dearborn, MI
- Livonia, MI
- Wayne, MI
- Issue Date:
- Research Org.:
- Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
- OSTI Identifier:
- 869815
- Patent Number(s):
- 5403563
- Application Number:
- 07/926,257
- Assignee:
- Ford Motor Company (Dearborn, MI)
- Patent Classifications (CPCs):
-
B - PERFORMING OPERATIONS B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL B01J - CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY
C - CHEMISTRY C01 - INORGANIC CHEMISTRY C01B - NON-METALLIC ELEMENTS
- DOE Contract Number:
- 86X-22001C
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- apparatus; silicon; nitride; precursor; solids; recovery; method; provided; collecting; reaction; product; entrained; gaseous; outflow; situs; condensable; vapor; condensate; formed; static; mixer; surfaces; heat; exchanger; captured; collected; processing; return; production; imide; optionally; integrated; process; caramic; reactant; feed; gas; comprising; halide; substantially; inert; carrier; reacted; liquid; ammonia; vessel; residual; vaporized; forming; recovery method; product solids; substantially inert; inert carrier; gaseous outflow; condensable vapor; solids entrained; reactant feed; static mixer; silicon nitride; carrier gas; heat exchange; heat exchanger; reaction product; reaction vessel; feed gas; gas comprising; comprising silicon; reaction situs; production process; solids recovery; collecting reaction; nitride precursor; entrained reaction; precursor solids; /422/55/261/366/
Citation Formats
Crosbie, Gary M, Predmesky, Ronald L, and Nicholson, John M. Apparatus for silicon nitride precursor solids recovery. United States: N. p., 1995.
Web.
Crosbie, Gary M, Predmesky, Ronald L, & Nicholson, John M. Apparatus for silicon nitride precursor solids recovery. United States.
Crosbie, Gary M, Predmesky, Ronald L, and Nicholson, John M. Tue .
"Apparatus for silicon nitride precursor solids recovery". United States. https://www.osti.gov/servlets/purl/869815.
@article{osti_869815,
title = {Apparatus for silicon nitride precursor solids recovery},
author = {Crosbie, Gary M and Predmesky, Ronald L and Nicholson, John M},
abstractNote = {Method and apparatus are provided for collecting reaction product solids entrained in a gaseous outflow from a reaction situs, wherein the gaseous outflow includes a condensable vapor. A condensate is formed of the condensable vapor on static mixer surfaces within a static mixer heat exchanger. The entrained reaction product solids are captured in the condensate which can be collected for further processing, such as return to the reaction situs. In production of silicon imide, optionally integrated into a production process for making silicon nitride caramic, wherein reactant feed gas comprising silicon halide and substantially inert carrier gas is reacted with liquid ammonia in a reaction vessel, silicon imide reaction product solids entrained in a gaseous outflow comprising residual carrier gas and vaporized ammonia can be captured by forming a condensate of the ammonia vapor on static mixer surfaces of a static mixer heat exchanger.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Apr 04 00:00:00 EDT 1995},
month = {Tue Apr 04 00:00:00 EDT 1995}
}