Method for accurate growth of vertical-cavity surface-emitting lasers

Chalmers, Scott A; Killeen, Kevin P; Lear, Kevin L

Advanced Search OptionsAdvanced Search queries use a traditional Term Search. For more info, see our FAQ.

All Fields:

Patent Title:

Abstract:

Assignee:

Inventor(s):

Patent Number:

Patent Classification (CPC):

All Classifications
A - human necessities
A01 - agriculture
A21 - baking
A22 - butchering
A23 - foods or foodstuffs
A24 - tobacco
A41 - wearing apparel
A42 - headwear
A43 - footwear
A44 - haberdashery
A45 - hand or travelling articles
A46 - brushware
A47 - furniture
A61 - medical or veterinary science
A62 - life-saving
A63 - sports
A99 - subject matter not otherwise provided for in this section
B - performing operations
B01 - physical or chemical processes or apparatus in general
B02 - crushing, pulverising, or disintegrating
B03 - separation of solid materials using liquids or using pneumatic tables or jigs
B04 - centrifugal apparatus or machines for carrying-out physical or chemical processes
B05 - spraying or atomising in general
B06 - generating or transmitting mechanical vibrations in general
B07 - separating solids from solids
B08 - cleaning
B09 - disposal of solid waste
B21 - mechanical metal-working without essentially removing material
B22 - casting
B23 - machine tools
B24 - grinding
B25 - hand tools
B26 - hand cutting tools
B27 - working or preserving wood or similar material
B28 - working cement, clay, or stone
B29 - working of plastics
B30 - presses
B31 - making articles of paper, cardboard or material worked in a manner analogous to paper
B32 - layered products
B33 - additive manufacturing technology
B41 - printing
B42 - bookbinding
B43 - writing or drawing implements
B44 - decorative arts
B60 - vehicles in general
B61 - railways
B62 - land vehicles for travelling otherwise than on rails
B63 - ships or other waterborne vessels
B64 - aircraft
B65 - conveying
B66 - hoisting
B67 - opening, closing {or cleaning} bottles, jars or similar containers
B68 - saddlery
B81 - microstructural technology
B82 - nanotechnology
B99 - subject matter not otherwise provided for in this section
C - chemistry
C01 - inorganic chemistry
C02 - treatment of water, waste water, sewage, or sludge
C03 - glass
C04 - cements
C05 - fertilisers
C06 - explosives
C07 - organic chemistry
C08 - organic macromolecular compounds
C09 - dyes
C10 - petroleum, gas or coke industries
C11 - animal or vegetable oils, fats, fatty substances or waxes
C12 - biochemistry
C13 - sugar industry
C14 - skins
C21 - metallurgy of iron
C22 - metallurgy
C23 - coating metallic material
C25 - electrolytic or electrophoretic processes
C30 - crystal growth
C40 - combinatorial technology
C99 - subject matter not otherwise provided for in this section
D - textiles
D01 - natural or man-made threads or fibres
D02 - yarns
D03 - weaving
D04 - braiding
D05 - sewing
D06 - treatment of textiles or the like
D07 - ropes
D10 - indexing scheme associated with sublasses of section d, relating to textiles
D21 - paper-making
D99 - subject matter not otherwise provided for in this section
E - fixed constructions
E01 - construction of roads, railways, or bridges
E02 - hydraulic engineering
E03 - water supply
E04 - building
E05 - locks
E06 - doors, windows, shutters, or roller blinds in general
E21 - earth drilling
E99 - subject matter not otherwise provided for in this section
F - mechanical engineering
F01 - machines or engines in general
F02 - combustion engines
F03 - machines or engines for liquids
F04 - positive - displacement machines for liquids
F05 - indexing schemes relating to engines or pumps in various subclasses of classes f01-f04
F15 - fluid-pressure actuators
F16 - engineering elements and units
F17 - storing or distributing gases or liquids
F21 - lighting
F22 - steam generation
F23 - combustion apparatus
F24 - heating
F25 - refrigeration or cooling
F26 - drying
F27 - furnaces
F28 - heat exchange in general
F41 - weapons
F42 - ammunition
F99 - subject matter not otherwise provided for in this section
G - physics
G01 - measuring
G02 - optics
G03 - photography
G04 - horology
G05 - controlling
G06 - computing
G07 - checking-devices
G08 - signalling
G09 - education
G10 - musical instruments
G11 - information storage
G12 - instrument details
G16 - information and communication technology [ict] specially adapted for specific application fields
G21 - nuclear physics
G99 - subject matter not otherwise provided for in this section
H - electricity
H01 - basic electric elements
H02 - generation
H03 - basic electronic circuitry
H04 - electric communication technique
H05 - electric techniques not otherwise provided for
H99 - subject matter not otherwise provided for in this section
Y - new / cross sectional technologies
Y02 - technologies or applications for mitigation or adaptation against climate change
Y04 - information or communication technologies having an impact on other technology areas
Y10 - technical subjects covered by former uspc

More Options ...

Title: Method for accurate growth of vertical-cavity surface-emitting lasers

Abstract

We report a method for accurate growth of vertical-cavity surface-emitting lasers (VCSELs). The method uses a single reflectivity spectrum measurement to determine the structure of the partially completed VCSEL at a critical point of growth. This information, along with the extracted growth rates, allows imprecisions in growth parameters to be compensated for during growth of the remaining structure, which can then be completed with very accurate critical dimensions. Using this method, we can now routinely grow lasing VCSELs with Fabry-Perot cavity resonance wavelengths controlled to within 0.5%.

Inventors:

Chalmers, Scott A ^[1]; Killeen, Kevin P ^[1]; Lear, Kevin L ^[1]

Albuquerque, NM

Issue Date:: Sun Jan 01 00:00:00 EST 1995

Research Org.:: AT&T

OSTI Identifier:: 869790

Patent Number(s):: 5397739

Assignee:: Sandia Corporation (Albuquerque, NM)

Patent Classifications (CPCs):: B - PERFORMING OPERATIONS B24 - GRINDING B24B - MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES

Show more

B - PERFORMING OPERATIONS B24 - GRINDING B24B - MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING
B24B37/013 - Devices or means for detecting lapping completion

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
H01L22/26 - {Acting in response to an ongoing measurement without interruption of processing, e.g. endpoint detection, in-situ thickness measurement

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01S - DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT
H01S5/0042 - {On wafer testing, e.g. lasers are tested before separating wafer into chips}
H01S5/18358 - {containing spacer layers to adjust the phase of the light wave in the cavity}
H01S5/18361 - {Structure of the reflectors, e.g. hybrid mirrors}

Show less

DOE Contract Number:: AC04-76DP00789

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Subject:: method; accurate; growth; vertical-cavity; surface-emitting; lasers; report; vcsels; single; reflectivity; spectrum; measurement; determine; structure; partially; completed; vcsel; critical; information; extracted; rates; allows; imprecisions; parameters; compensated; remaining; dimensions; routinely; grow; lasing; fabry-perot; cavity; resonance; wavelengths; controlled; cavity surface; surface-emitting laser; growth rate; vertical-cavity surface-emitting; partially completed; surface-emitting lasers; critical dimension; growth rates; emitting laser; fabry-perot cavity; cavity resonance; resonance wavelengths; resonance wavelength; emitting lasers; accurate growth; critical dimensions; /438/117/

Citation Formats


                    Chalmers, Scott A, Killeen, Kevin P, and Lear, Kevin L. Method for accurate growth of vertical-cavity surface-emitting lasers.  United States: N. p., 1995. 
        Web.

Copy to clipboard


                    Chalmers, Scott A, Killeen, Kevin P, & Lear, Kevin L. Method for accurate growth of vertical-cavity surface-emitting lasers.  United States.

Copy to clipboard


                    Chalmers, Scott A, Killeen, Kevin P, and Lear, Kevin L. Sun .  
        "Method for accurate growth of vertical-cavity surface-emitting lasers".  United States.  https://www.osti.gov/servlets/purl/869790.

Copy to clipboard


                    
@article{osti_869790,

  title        = {Method for accurate growth of vertical-cavity surface-emitting lasers},

  author       = {Chalmers, Scott A and Killeen, Kevin P and Lear, Kevin L},

  abstractNote = {We report a method for accurate growth of vertical-cavity surface-emitting lasers (VCSELs). The method uses a single reflectivity spectrum measurement to determine the structure of the partially completed VCSEL at a critical point of growth. This information, along with the extracted growth rates, allows imprecisions in growth parameters to be compensated for during growth of the remaining structure, which can then be completed with very accurate critical dimensions. Using this method, we can now routinely grow lasing VCSELs with Fabry-Perot cavity resonance wavelengths controlled to within 0.5%.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {Sun Jan 01 00:00:00 EST 1995},

  month        = {Sun Jan 01 00:00:00 EST 1995}

}

Copy to clipboard

Patent:

Save / Share:

Export Metadata

Save to My Library

Works referenced in this record:

Real‐time optical diagnostics for epitaxial growth
journal, May 1991

Aspnes, D. E.; Quinn, W. E.; Gregory, S.
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 9, Issue 3
https://doi.org/10.1116/1.577332

Molecular beam epitaxy growth of vertical cavity optical devices with in situ corrections
journal, September 1992

Bacher, K.; Pezeshki, B.; Lord, S. M.
Applied Physics Letters, Vol. 61, Issue 12
https://doi.org/10.1063/1.107546

Diffuse optical reflectivity measurements on GaAs during molecular‐beam epitaxy processing
journal, July 1992

Lavoie, C.; Johnson, S. R.; Mackenzie, J. A.
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 10, Issue 4
https://doi.org/10.1116/1.577880